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Pressure sensor for high acceleration environments

  • US 20060288792A1
  • Filed: 09/01/2006
  • Published: 12/28/2006
  • Est. Priority Date: 10/18/2004
  • Status: Active Grant
First Claim
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:

  • a chamber partially defined by a non-planar membrane, the chamber containing a fluid at a reference pressure, such that the non-planar membrane deflects due to pressure differentials between the reference pressure and the fluid pressure; and

    , associated circuitry for converting the deflection of the non-planar membrane into an output signal indicative of the fluid pressure;

    wherein, the membrane area exposed to the fluid at the reference pressure has a mass of less than 0.1 grams.

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