Method for preparing light emitting diode device having heat dissipation rate enhancement

• US 20060289892A1
• Filed: 06/27/2006
• Published: 12/28/2006
• Est. Priority Date: 06/27/2005
• Status: Abandoned Application

• Current Assignee: Hanbeam Co., Ltd.
• Original Assignee: Hanbeam Co., Ltd.
• Inventors: Kho, Dong Han, Chun, Sang Ki, Lee, Jae Seung, Chang, Suk Ky, Choi, Min Ho, Shin, Bu Gon, Park, Soo Min, Yu, Min A., Kang, Jong Hoon, Ha, Duk Sik
• Application Number:
  US11/474,972
• Publication Number:
  US 20060289892A1
• Time in Patent Office: Days
• US Class Current: 257/103
• CPC Class Codes: H01L 2224/45144 Gold (Au) as principal constituent
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48247 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/49107 on the semiconductor or solid-state body
• CPC Class Codes: H01L 2224/73265 Layer and wire connectors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 33/0093 Wafer bonding; Removal of the growth substrate
• CPC Class Codes: H01L 33/0095 Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination

Abstract

A method for fabricating an LED having section grown on a sapphire substrate, a boded structure, and a unit chip separated from the bonded structure. The method includes (a) bonding the section grown on a first surface of the sapphire substrate to a first surface of a first substrate with a first binder; (b) bonding a second surface of the first substrate to a first surface of a second substrate with a second binder; (c) removing the second substrate from a bonded structure obtained as a result of step (b) after polishing a second surface of the sapphire substrate; (d) separating the bonded structure into unit chips after the second substrate has been removed; and (e) bonding the second surface of the polished sapphire substrate provided in each unit chip to a lead frame, and removing the first substrate. This method improves heat dissipation efficiency.

Claims

1. A method for fabricating a light emitting diode device which has a light emitting diode section grown on a sapphire substrate, the method comprising the steps of:

(a) bonding the light emitting diode section grown on a first surface of the sapphire substrate to a first surface of a first substrate by means of a first binder;

(b) bonding a second surface of the first substrate to a first surface of a second substrate by means of a second binder;

(c) removing the second substrate from a bonded structure obtained as a result of step (b) after polishing a second surface of the sapphire substrate;

(d) separating the bonded structure into unit chips after the second substrate has been removed from the bonded structure; and

(e) bonding the second surface of the polished sapphire substrate provided in each unit chip to a lead frame, and then removing the first substrate.

2. The method as claimed in claim 1, wherein the first substrate is made of material which can be processed by scribing/breaking process.

3. The method as claimed in claim 1, wherein the first substrate is formed on at least one surface thereof with at least one recess aligned in a regular interval.

4. The method as claimed in claim 1, wherein the first binder used in step (a) has an adhesion-drop temperature different from that of the second binder used in step (b), and a differential adhesion-drop temperature between the first and second binders is equal to or larger than 10°

C.

5. The method as claimed in claim 1, wherein the first binder in step (a) has melting point different from that of the second binder in step (b), and the first binder has a higher melting point than that of the second binder.

6. The method as claimed in claim 1, wherein the first and second binders are made from materials having sensitive to light radiation corresponding to light permeability of the first substrate or the second substrate.

7. The method of claimed in claim 1, wherein the first in step (a) and the second binder in step (b) are soluble to different solvents from each other.

8. The method as claimed in claim 1, wherein the first and second binders include at least one selected from the group consisting of side chain crystalline polymer, pressure sensitive adhesive, thermal foaming agent, heat foaming adhesive, plasticizer having a high boiling point, and organic crystal.

9. The method as claimed in claim 1, wherein the bonding in steps (a) and (b) is performed by applying heat, pressure or both of them simultaneously.

10. The method as claimed in claim 1, wherein, in steps (c) and (e), the first and second substrates are removed through the sub-steps of:

1) heating (or cooling) the first and second binders with a temperature higher (or lower) than an adhesion-drop temperature of the first and second binders;

2) selectively radiating light onto the first binder or the second binder; and

3) applying a solvent capable of selectively dissolving the first binder or the second binder, or

4) utilizing at least one of sub-steps

     1) to

     3).

11. The method as claimed in claim 10, wherein, in step (c), the second substrate is removed by heating the second binder with a temperature higher than the adhesion-drop temperature of the second binder and lower than the adhesion-drop temperature of the first binder, or by cooling the second binder with a temperature lower than the adhesion-drop temperature of the second binder and higher than the adhesion-drop temperature of the first binder.

12. The method as claimed in claim 1, wherein the thickness of sapphire substrate polished in step (c) is in a range of 5 to 80 μ

m.

13. The method as claimed in claim 1, wherein, in step (d), the unit chip is obtained by:

(a) performing a scribing process or a breaking process with respect to the bonded structure consisting of the sapphire substrate and the first substrate;

(b) irradiating laser onto the bonded structure consisting of the sapphire substrate and the first substrate;

or

(c) performing the breaking process with respect to the bonded structure after separating a part of the bonded structure consisting of the sapphire substrate and the first substrate by using laser irradiation;

14. The method as claimed in claim 1, prior to step (a), further comprising the steps of:

(i) etching the light emitting diode section grown on the sapphire substrate to expose an n-type layer and then depositing an n-type ohmic contact metal layer on the exposed n-type layer; and

(ii) depositing a p-type ohmic contact metal layer on a p-type layer of the light emitting diode section grown on the sapphire substrate;

or

following step (e), further comprising the step of wire bonding, molding treatment or wire bonding and molding treatment for a light emitting diode section surface which is exposed as the first substrate is separated.

15. A light emitting diode device fabricated by the method as claimed in claim 1.

16. A bonded structure comprising:

(a) a first substrate made from a material suitable for a breaking process; and

(b) a sapphire substrate formed on a first surface thereof with a light emitting diode section, wherein a first surface of the first substrate is bonded to the light emitting diode section of the sapphire substrate by means of a binder.

18. The bonded structure as claimed in claim 16 or 17, wherein the first substrate has the same size or larger than that of the sapphire substrate.

19. The bonded structure as claimed in claim 16 or 17, wherein the first substrate is metal substrate, silicon wafer or ceramic wafer.

23. The bonded structure as claimed in claim 16 or 17, wherein the sapphire substrate has a thickness in a range of about 150 to 700 μ

m before the sapphire substrate is polished, and has a thickness in a range of about 5 to 80 μ

m after the sapphire substrate has been polished.

17. A bonded structure comprising:

(a) a first substrate formed on at least one surface thereof with at least one recess aligned in a regular interval; and

(b) a sapphire substrate formed on a first surface thereof with a light emitting diode section, wherein a first surface of the first substrate is bonded to the light emitting diode section of the sapphire substrate by means of a binder.

20. The bonded structure as claimed in claim 17, wherein light emitting diode sections aligned on the sapphire substrate with a regular interval are fixedly positioned in spaces formed between the recesses aligned on at least one surface of the first substrate by means of adhesives.

21. The bonded structure as claimed in claim 17, wherein the recess is formed through a scribing process or a dicing process.

22. The bonded structure as claimed in claim 17, wherein the recesses are aligned in a linear pattern, in which the recesses are parallel to each other, or in a cross stripe pattern, in which at least two linear lines cross each other.

24. A unit chip obtained by separating a bonded structure consisting of a first substrate and a sapphire substrate after polishing the sapphire substrate such that the sapphire substrate has a thickness in a range of about 5 to 80 μ

m.