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Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method

  • US 20060290914A1
  • Filed: 06/24/2005
  • Published: 12/28/2006
  • Est. Priority Date: 06/24/2005
  • Status: Active Grant
First Claim
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1. A lithographic apparatus, comprising:

  • an illumination system that conditions a radiation beam;

    an array of individually controllable elements that modulate the radiation beam;

    a substrate table that supports a substrate;

    a projection system that projects the modulated radiation beam onto a target portion of the substrate, thereby applying a pattern to the target portion of the substrate, the pattern comprising a first line and a second line, the first line being offset from the second line;

    a position encoder that determines a position of the substrate table, the position encoder comprising a position sensor and a scale, the scale comprising a plurality of lines intended to be straight and parallel to one another;

    an imaging device that obtains an image of the first line and the second line; and

    an image processing unit that measures separation between the first line and the second line in a plurality of locations thereby defining a plurality of separations and determines a non-uniformity of at least a part of the scale from the plurality of separations.

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