Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method

• US 20060290914A1
• Filed: 06/24/2005
• Published: 12/28/2006
• Est. Priority Date: 06/24/2005
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Van Der Pasch, Engelbertus Antonius Fransiscus, Van Der Schoot, Harmen Klaas
• Granted Patent: US 7,408,617 B2
• Time in Patent Office: Days
• US Class Current: 355/67
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70625 Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness

Abstract

A lithographic apparatus comprises an illumination system, an array of individually controllable elements, a substrate table, a projection system, a position encoder, an imaging device, and an image processing unit. The illumination system conditions a radiation beam. The array of individually controllable elements modulates the cross-section of the radiation beam. The substrate table supports a substrate. The projection system projects the modulated radiation beam onto a target portion of the substrate, thereby applying a pattern to the target portion of the substrate. The pattern comprises a first line and a second line. The first line is offset from the second line. The position encoder determines a position of the substrate table. The position encoder comprises a position sensor and a scale. The scale comprises a plurality of lines intended to be straight and parallel to one another. The imaging device obtains an image of the first line and the second line. The image processing unit measures the separation between the first line and the second line in a plurality of locations, and determines the non-uniformity of at least a part of the scale from the plurality of separations.

Claims

1. A lithographic apparatus, comprising:

an illumination system that conditions a radiation beam;

an array of individually controllable elements that modulate the radiation beam;

a substrate table that supports a substrate;

a projection system that projects the modulated radiation beam onto a target portion of the substrate, thereby applying a pattern to the target portion of the substrate, the pattern comprising a first line and a second line, the first line being offset from the second line;

a position encoder that determines a position of the substrate table, the position encoder comprising a position sensor and a scale, the scale comprising a plurality of lines intended to be straight and parallel to one another;

an imaging device that obtains an image of the first line and the second line; and

an image processing unit that measures separation between the first line and the second line in a plurality of locations thereby defining a plurality of separations and determines a non-uniformity of at least a part of the scale from the plurality of separations.

2. The lithographic apparatus of claim 1, wherein the image processing unit establishes a profile of the separation between the first line and the second line.

3. The lithographic apparatus of claim 2, wherein the image processing unit analyzes the profile and determines from the analysis a corrective measure that will make the separation between the first line and the second line substantially constant in subsequent patterning.

4. The lithographic apparatus of claim 3, wherein the corrective measure comprises introducing a non-uniformity into the array of individually controllable elements that compensates for the non-uniformity of the scale.

5. The lithographic apparatus of claim 3, wherein the corrective measure comprises controlling a position of a positioner that positions the substrate to compensate for the non-uniformity of the scale.

6. The lithographic apparatus of claim 1, wherein at least one of the first line and second line are part of a longer line.

7. The lithographic apparatus of claim 1, further comprising a storage medium that stores the non-uniformity of at least a part of the scale.

8. A lithographic apparatus, comprising:

an illumination system that conditions a radiation beam;

an array of individually controllable elements that modulate the radiation beam according to an intended pattern;

a substrate table that supports a substrate;

a projection system that projects the modulated radiation beam onto a target portion of the substrate;

a position encoder that determines a position of the substrate table, the position encoder comprising a position sensor and a scale, the scale comprising a plurality of lines intended to be equally spaced;

an imaging device that obtains an image of at least a part of a pattern exposed on the substrate; and

an image processing unit that compares the exposed pattern with at least a part of the intended pattern and determines a non-uniformity of at least a part of the scale from the comparison.

9. The lithographic apparatus of claim 8, wherein the comparison comprises comparing a position of a part of the exposed pattern with a position of a part of the intended pattern.

10. The lithographic apparatus of claim 8, wherein the comparison further comprises comparing a position of a part of the exposed pattern with a position of an adjacent part of the exposed pattern.

11. The lithographic apparatus of claim 8, wherein the image processing unit analyzes the comparison and determines from the analysis a corrective measure that will make the exposed pattern correspond to the intended pattern in subsequent pattern applications.

12. The lithographic apparatus of claim 11, wherein the corrective measure comprises introducing a non-uniformity into the array of individually controllable elements that compensates for the non-uniformity of the scale.

13. The lithographic apparatus of claim 11, wherein the corrective measure comprises controlling a position of a positioner that positions the substrate to compensate for the non-uniformity of the scale.

14. The lithographic apparatus of claim 8, further comprising a storage medium that stores the non-uniformity of at least a part of the scale.

15. A method of determining a non-uniformity of lithographic apparatus, comprising:

projecting a modulated radiation beam onto a target portion of a substrate, thereby applying a pattern to the target portion of a substrate, the pattern comprising a first line and a second line, the first line being offset from the second line;

determining a position of a substrate table supporting the substrate using a position encoder, the position encoder comprising a position sensor and a scale, the scale comprising a plurality of lines intended to be equally spaced;

using an imaging device to obtain an image of the first line and the second line;

measuring a separation between the first line and the second line in a plurality of locations; and

determining the non-uniformity of at least a part of the scale from the plurality of separations.

16. The method of claim 15, further comprising establishing a profile of the separation between the first line and the second line.

17. The method of claim 16, further comprising:

analyzing the profile; and

determining from the analysis a corrective measure that will make the separation between the first line and the second line substantially constant in subsequent pattern applications.

18. The method of claim 17, wherein the corrective measure comprises introducing a non-uniformity into an array of individually controllable elements, which are used to generate the modulated radiation beam, which compensates for the non-uniformity of the scale.

19. The method of claim 17, wherein the corrective measure comprises controlling a position of a positioner that positions the substrate to compensate for the non-uniformity of the scale.

20. A flat panel display manufactured according to the method of claim 15.

21. A method of determining a non-uniformity of lithographic apparatus, comprising:

projecting a modulated radiation beam onto a target portion of a substrate, thereby applying an exposed pattern to the target portion of substrate;

determining a position of a substrate table supporting the substrate using a position encoder, the position encoder comprising a position sensor and a scale, the scale comprising a plurality of lines intended to be equally spaced;

using an imaging device to obtain an image of at least part of the pattern;

comparing the pattern with a corresponding intended pattern; and

determining a non-uniformity of at least a part the of scale from the comparison.

22. The method of claim 21, wherein the comparing step comprises comparing a position of a part of the exposed pattern with a position of a part of the corresponding intended pattern.

23. The method of claim 21, wherein the comparing step further comprises comparing a position of a part of the exposed pattern with a position of an adjacent part of the exposed pattern.

24. The method of claim 21, further comprising:

analyzing the comparison; and

determining from the analyzing step a corrective measure that will make the exposed pattern correspond to the intended pattern in subsequent pattern applications.

25. The method of claim 24, wherein the corrective measure comprises introducing a non-uniformity into an array of individually controllable elements, which are used to produce the modulated radiation beam, which compensates for the non-uniformity of the scale.

26. The method of claim 24, wherein the corrective measure comprises controlling a position of a positioner that positions the substrate to compensate for the non-uniformity of the scale.

27. A flat panel display manufactured according to the method of claim 22.

28. A lithographic apparatus, comprising:

an illumination source that conditions a radiation beam;

an array of individually controllable elements that modulate the radiation beam;

a substrate table that supports a substrate;

a projection system that projects the modulated radiation beam onto a target portion of the substrate;

a positioner that positions the substrate table; and

a position encoder arranged to determine a position of the substrate table.