Arrangement of aperture diaphragms and/or filters, with changeable characteristics for optical devices
First Claim
1. An apparatus for use with an optical device, the apparatus comprising:
- at least one of an imaging path and an illumination beam path;
at least one two-dimensional array made up of a plurality of individual controllable elements for forming aperture diaphragms and/or filters, wherein the array is arranged in at least one of the imaging path and the illumination beam path; and
a control unit for controlling the individual elements.
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Abstract
An arrangement making use of two-dimensional arrays consisting of individually controllable elements, for forming aperture diaphragms in the beam paths of optical devices. In an arrangement of diaphragm apertures and/or filters, in which the form, position and/or optical characteristics can be changed, for use in optical devices, at least one two-dimensional array, consisting of individually controllable elements, is arranged for forming the diaphragm apertures and/or filters in the optical imaging and/or illumination beam paths and is connected with a control unit for controlling the individual elements In this way, the geometry, the optical characteristics and/or the position of the aperture diaphragms and/or the filters can be controlled very quickly. These changes can also be made “online” during the process of measurement or adjustment in the sense of optical fine tuning. Furthermore, using these systems, the elaborate and time consuming preparation of the diaphragm apertures with geometric forms can be omitted.
62 Citations
13 Claims
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1. An apparatus for use with an optical device, the apparatus comprising:
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at least one of an imaging path and an illumination beam path;
at least one two-dimensional array made up of a plurality of individual controllable elements for forming aperture diaphragms and/or filters, wherein the array is arranged in at least one of the imaging path and the illumination beam path; and
a control unit for controlling the individual elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An apparatus for use with an optical device, the apparatus comprising:
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an imaging path;
an illumination beam path; and
at least one two-dimensional array made up of a plurality of individual controllable elements for forming aperture diaphragms arranged at least one of the illumination beam path and the imaging path. - View Dependent Claims (11)
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12. An apparatus for use with an optical device, the apparatus comprising:
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an imaging path;
an illumination beam path; and
at least one two-dimensional array made up of a plurality of individual controllable elements for forming aperture filters arranged in at least one of the illumination beam path and the imaging path. - View Dependent Claims (13)
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Specification