Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
First Claim
1. A micro-electro-mechanical system (MEMS) variable capacitor, comprising:
- (a) first and second stationary actuation electrodes attached to a substrate;
(b) first and second movable actuation electrodes spaced apart from the first and second stationary actuation electrodes, respectively, wherein the first and second movable actuation electrodes are movable with respect to the first and second stationary actuation electrodes when a voltage is applied across the movable actuation electrodes and the stationary actuation electrodes;
(c) a stationary capacitive electrode attached to the substrate;
(d) a movable capacitive electrode attached to the first and second movable actuation electrodes and spaced from the stationary capacitive electrode for movement of the movable capacitive electrode with respect to the stationary capacitive electrode upon application of voltage across the movable actuation electrodes and the stationary actuation electrodes to change the capacitance between the capacitive electrodes; and
(e) first, second, and third tethers attached to the first movable actuation electrode, the second movable actuation electrode, and the movable capacitive electrode, respectively, wherein the tethers are flexible for allowing movement of the first movable actuation electrode, the second movable actuation electrode, and the movable capacitive electrode, respectively, with respect to the first stationary actuation electrode, the second stationary actuation electrode, and the stationary capacitive electrode, respectively.
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Abstract
Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-mechanical system (MEMS) variable capacitor. The variable capacitor can include first and second actuation electrodes wherein one of the actuation electrodes is movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include first and second capacitive electrodes. The method can include applying a voltage to the first and second actuation electrodes for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes.
37 Citations
23 Claims
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1. A micro-electro-mechanical system (MEMS) variable capacitor, comprising:
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(a) first and second stationary actuation electrodes attached to a substrate;
(b) first and second movable actuation electrodes spaced apart from the first and second stationary actuation electrodes, respectively, wherein the first and second movable actuation electrodes are movable with respect to the first and second stationary actuation electrodes when a voltage is applied across the movable actuation electrodes and the stationary actuation electrodes;
(c) a stationary capacitive electrode attached to the substrate;
(d) a movable capacitive electrode attached to the first and second movable actuation electrodes and spaced from the stationary capacitive electrode for movement of the movable capacitive electrode with respect to the stationary capacitive electrode upon application of voltage across the movable actuation electrodes and the stationary actuation electrodes to change the capacitance between the capacitive electrodes; and
(e) first, second, and third tethers attached to the first movable actuation electrode, the second movable actuation electrode, and the movable capacitive electrode, respectively, wherein the tethers are flexible for allowing movement of the first movable actuation electrode, the second movable actuation electrode, and the movable capacitive electrode, respectively, with respect to the first stationary actuation electrode, the second stationary actuation electrode, and the stationary capacitive electrode, respectively. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A micro-electro-mechanical system (MEMS) variable capacitor, comprising:
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(a) a movable component being movable with respect to a substrate and comprising first, second, and third portions;
(b) first and second stationary actuation electrodes attached to the substrate;
(c) first and second movable actuation electrodes spaced apart from the first and second stationary actuation electrodes, respectively, wherein the first movable actuation electrode is attached to the first portion of the movable component, wherein the second actuation electrode is attached to the second portion of the movable component, and wherein the first and second movable actuation electrodes are movable with respect to the first and second stationary actuation electrodes when a voltage is applied across the movable actuation electrodes and the stationary actuation electrodes;
(d) a stationary capacitive electrode attached to the substrate;
(e) a movable capacitive electrode attached to the third portion of the movable component and spaced from the stationary capacitive electrode for movement of the movable capacitive electrode with respect to the stationary capacitive electrode upon application of voltage across the movable actuation electrodes and the stationary actuation electrodes to change the capacitance between the capacitive electrodes; and
(f) first, second, and third tethers attaching the first, second, and third portions, respectively, of the movable component to the substrate, wherein the tethers are flexible for allowing movement of the first movable actuation electrode, the second movable actuation electrode, and the movable capacitive electrode, respectively, with respect to the first stationary actuation electrode, the second stationary actuation electrode, and the stationary capacitive electrode, respectively. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification