Gas phase chemical sensor based on film bulk resonators (FBAR)
First Claim
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1. An apparatus, comprising:
- a first frequency bulk film acoustic resonator (FBAR) device;
a second FBAR device coated with a target chemical selective layer; and
means for determining a differential frequency output of the first FBAR device and the second FBAR device to determine the presence of the target chemical.
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Abstract
An FBAR device may be chemically functionalized by depositing an interactive layer so that targeted chemicals are preferentially adsorbed. Such miniaturized chemical sensors may be combined with wireless network technology. For example, a chemical sensor may be integrated in a cell phone, PDA, a watch, or a car with wireless connection and GPS. Since such devices are widely populated, a national sensor network may be established. Consequently, a national toxicity map can be generated in real time. Detailed chemical information may be obtained, such as if a chemical is released by a source fixed on ground or by a moving object, or if is spread by explosives or by wind and so on.
29 Citations
19 Claims
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1. An apparatus, comprising:
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a first frequency bulk film acoustic resonator (FBAR) device;
a second FBAR device coated with a target chemical selective layer; and
means for determining a differential frequency output of the first FBAR device and the second FBAR device to determine the presence of the target chemical. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method, comprising:
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coating a frequency bulk film acoustic resonator (FBAR) in an FBAR oscillator with a target chemical selective layer;
determining a differential frequency between the coated FBAR oscillator and a reference uncoated FBAR oscillator; and
determining the presence of the target chemical from the differential frequency. - View Dependent Claims (9, 10, 11, 12)
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13. The method as recited in claim comprising:
programming a multiplexer to select ones of plurality of FBAR oscillators.
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14. A system, comprising:
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a plurality of wireless devices each comprising a frequency bulk film acoustic resonator (FBAR) coated with a target chemical selective layer;
a remote receiver location for receiving information from the plurality of wireless devices indicating the presence of a target chemical in locations of the plurality of wireless devices. - View Dependent Claims (15, 16, 17, 18, 19)
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Specification