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Gas phase chemical sensor based on film bulk resonators (FBAR)

  • US 20070000305A1
  • Filed: 06/30/2005
  • Published: 01/04/2007
  • Est. Priority Date: 06/30/2005
  • Status: Abandoned Application
First Claim
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1. An apparatus, comprising:

  • a first frequency bulk film acoustic resonator (FBAR) device;

    a second FBAR device coated with a target chemical selective layer; and

    means for determining a differential frequency output of the first FBAR device and the second FBAR device to determine the presence of the target chemical.

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