Multi-axis sensor unit and multi-axis sensor utilizing it

• US 20070000335A1
• Filed: 06/21/2004
• Published: 01/04/2007
• Est. Priority Date: 09/30/2003
• Status: Active Grant

• Current Assignee: Nitta Corporation
• Original Assignee: Nitta Corporation
• Inventors: Morimoto, Hideo
• Granted Patent: US 7,500,406 B2
• Time in Patent Office: Days
• US Class Current: 73/862.45
• CPC Class Codes: G01L 5/162 of piezoresistors
• CPC Class Codes: G01L 5/1627 of strain gauges using piezoresistors G01L5/162
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Abstract

The power consumption is reduced, wiring is simplified, and the cost is reduced. A multiaxial sensor unit 10 for measuring one or more of multiaxial force, moment, acceleration, and angular acceleration, externally applied, includes eight strain gauges R11 to R24 disposed on a single plane, and one bridge circuit 11 constructed by connecting the strain gauges R11 to R24. Thereby, bridge circuits 11 and strain gauges R11 to R24 are reduced in comparison with a prior art to reduce the power consumption, simplify wiring, and reduce the manufacturing cost.

Claims

1. A multiaxial sensor unit for measuring one or more of two or more-axial force, moment, acceleration, and angular acceleration, externally applied, comprising:

eight strain gauges disposed on a single plane, and one bridge circuit constructed by connecting the strain gauges.

3. The multiaxial sensor unit according to claim 1, wherein

the unit comprises a strain generation body comprising a force receiving portion provided at a center, a fixed portion provided on an outer circumference, and an annular diaphragm portion connecting the force receiving portion and the fixed portion to each other, and

the strain gauges are disposed at four positions on outer and inner edges of the diaphragm on a line perpendicular to a center line of the diaphragm;

and at four positions on the outer and inner edges of the diaphragm on a line perpendicular to the line perpendicular to the center line of the diaphragm.

4. The multiaxial sensor unit according to claim 1, wherein each of the strain gauges is a piezoresistive element or a strain gauge formed by sputtering.

5. A multiaxial sensor comprising a plurality of multiaxial sensor units according to claim 1.

6. The multiaxial sensor according to claim 5, wherein the multiaxial sensor units are disposed around a center point of the multiaxial sensor at regular angular intervals at the same distance from the center point.

7. The multiaxial sensor according to claim 6, wherein the angular interval is 90 degrees.

8. The multiaxial sensor according to claim 7, wherein the multiaxial sensor units are disposed in positive and negative directions on X- and Y-axes with an origin being set at the center point.

9. The multiaxial sensor according to claim 6, wherein the angular interval is 120 degrees.

10. The multiaxial sensor according to claim 5, wherein the strain gauges are disposed on outer and inner edges of the diaphragm on a line extending through a center point of the multiaxial sensor and a center point of each multiaxial sensor unit;

and on the outer and inner edges of the diaphragm on a line perpendicular to the former line at the center point of the multiaxial sensor unit.

11. The multiaxial sensor according to claim 5, wherein the sensor comprises a first member comprising the multiaxial sensor units each comprising the strain gauges;

and a second member comprising strain generation bodies opposed to the multiaxial sensor units and comprising no strain gauges, and

opposed force receiving portions of strain generation bodies are connected to each other, and multiaxial forces and moments applied between the first and second members are measured.

12. The multiaxial sensor according to claim 5, wherein the sensor comprises the multiaxial sensor units and an operation body provided on the force receiving portion of each multiaxial sensor unit, and multiaxial accelerations and angular accelerations applied to the multiaxial sensor units are measured.

2. A multiaxial sensor unit for measuring one or more of three or more-axial force, moment, acceleration, and angular acceleration, externally applied, comprising:

eight strain gauges disposed on a single plane, and two bridge circuits constructed by connecting the strain gauges.