MULTI-STEP ANNEAL OF THIN FILMS FOR FILM DENSIFICATION AND IMPROVED GAP-FILL
1 Assignment
0 Petitions
Accused Products
Abstract
A method of annealing a substrate comprising a trench containing a dielectric material, the method including annealing the substrate at a first temperature of about 200° C. to about 800° C. in a first atmosphere comprising an oxygen containing gas, and annealing the substrate at a second temperature of about 800° C. to about 1400° C. in a second atmosphere lacking oxygen. In addition, a method of annealing a substrate comprising a trench containing a dielectric material, the method including annealing the substrate at a first temperature of about 400° C. to about 800° C. in the presence of an oxygen containing gas, purging the oxygen containing gas away from the substrate, and raising the substrate to a second temperature from about 900° C. to about 1100° C. to further anneal the substrate in an atmosphere that lacks oxygen.
113 Citations
44 Claims
-
1-22. -22. (canceled)
-
23. An annealing system comprising:
-
a housing configured to form an annealing chamber;
a substrate holder configured to hold a substrate within said annealing chamber, wherein the substrate comprises a trench filled with a dielectric material;
a gas distribution system configured to introduce gases into said annealing chamber; and
a heating system configured to heat the substrate, wherein the gas distribution system introduces a first anneal gas comprising an oxygen containing gas into the chamber while the heating system heats the substrate to a first temperature of about 200°
C. to about 800°
C.; and
the heating system heats the substrate to a second temperature of about 800°
C. to about 1400°
C. in an atmosphere lacking oxygen, after a purge of the oxygen containing gas from the chamber. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32)
-
-
33. A multi-stage annealing system comprising:
-
an annealing chamber;
a substrate holder configured to hold one or more substrate wafers;
a gas distribution system configured to introduce one or more first anneal gases into the chamber during a first anneal stage, and one or more second anneal gases during a second anneal stage, wherein the first anneal gases comprise an oxygen containing gas and the second anneal gases do not include oxygen; and
a heating system configured to heat the annealing chamber to about 200°
C. to about 800°
C. during the first anneal stage and increase the temperature at a predefine rate to about 800°
C. to about 1400°
C. during the second anneal stage. - View Dependent Claims (34, 35, 36, 37)
-
-
38. An annealing system comprising:
-
an annealing chamber;
a substrate holder configured to hold at least one substrate wafer;
a gas distribution system configured to introduce gases into said annealing chamber; and
a heating system comprising a rapid thermal processor configured first to heat the annealing chamber to about 200°
C. to about 800°
C. in a first atmosphere comprising an oxygen containing gas, and then heat the chamber to about 800°
C. to about 1400°
C. in a second atmosphere that lacks oxygen. - View Dependent Claims (39, 40, 41, 42, 43, 44)
-
Specification