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Versatile system for restricting movement of MEMS structures

  • US 20070001542A1
  • Filed: 06/30/2005
  • Published: 01/04/2007
  • Est. Priority Date: 06/30/2005
  • Status: Abandoned Application
First Claim
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1. A micro-electromechanical device comprising:

  • a movable first structure;

    a gate structure;

    a latch structure, disposed along the movable first structure in proximity to the gate structure; and

    a locking signal element, adapted to force the latch structure into engagement with the gate structure.

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