MEMS resonator array structure and method of operating and using same
First Claim
1. A MEMS array structure comprising:
- a plurality of MEMS resonators, each MEMS resonator including;
a plurality of elongated straight beam sections wherein each beam section includes a first end and a second end;
a plurality of curved sections, wherein each curved section includes a first end and a second end, wherein each end of a beam section is connected to an associated end of one of the curved section to thereby form a geometric shape; and
one or more resonator coupling sections, wherein at least one resonator coupling section is disposed between each of the opposing elongated straight beam sections of adjacent MEMS resonators.
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Accused Products
Abstract
A plurality of mechanically coupled MEMS resonators that are arranged in an N×M MEMS array structure. Each MEMS resonators includes a plurality of straight (or substantially straight) elongated beam sections that are connected by curved/rounded sections. Each elongated beam section is connected to another elongated beam section at a distal end via the curved/rounded sections thereby forming a geometric shape (e.g., a rounded square). Further, each resonator is mechanically coupled to at least one other adjacent resonator of the array via a resonator coupling section. The resonator coupling sections may be disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at the same or substantially the same frequency. The resonators oscillate in a combined elongating (or breathing) mode and bending mode; that is, the beam sections exhibit an elongating-like (or breathing-like) motion and a bending-like motion. The one or more of the resonators of the array structure may include one or more nodal points or areas (i.e., portions of the resonator that are stationary, experience little movement, and/or are substantially stationary during oscillation of the resonator/array) in one or more portions or areas of the curved sections of the structure. The nodal points are suitable and/or preferable locations to anchor the resonator/array to the substrate.
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Citations
35 Claims
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1. A MEMS array structure comprising:
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a plurality of MEMS resonators, each MEMS resonator including;
a plurality of elongated straight beam sections wherein each beam section includes a first end and a second end;
a plurality of curved sections, wherein each curved section includes a first end and a second end, wherein each end of a beam section is connected to an associated end of one of the curved section to thereby form a geometric shape; and
one or more resonator coupling sections, wherein at least one resonator coupling section is disposed between each of the opposing elongated straight beam sections of adjacent MEMS resonators. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A MEMS array structure comprising:
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a plurality of MEMS resonators, each MEMS resonator including;
a plurality of elongated straight beam sections wherein each beam section includes a first end and a second end;
a plurality of curved sections, wherein each curved section includes a first end and a second end, wherein each end of a beam section is connected to an associated end of one of the curved section to thereby form a geometric shape; and
wherein at least one curved section includes a nodal point;
a plurality of resonator coupling sections, wherein at least one resonator coupling section is disposed between at least one pair of opposing elongated straight beam sections of adjacent MEMS resonators such that each MEMS resonator is connected to at least one adjacent MEMS resonator; and
a plurality of anchor coupling sections, wherein the at least one nodal point of each MEMS resonator is connected to a substrate anchor via an associated anchor coupling section. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A MEMS array structure comprising:
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a plurality of MEMS resonators, each MEMS resonator including;
a plurality of elongated straight beam sections wherein each beam section includes a first end and a second end;
a plurality of curved sections, wherein each curved section includes a first end and a second end, wherein each end of a beam section is connected to an associated end of one of the curved section to thereby form a geometric shape; and
one or more resonator coupling sections, wherein each of the opposing elongated straight beam sections of adjacent MEMS resonators includes a resonator coupling section connected therebetween;
a plurality of sense electrodes;
a plurality of drive electrodes, wherein the sense and drive electrodes are juxtaposed one or more of the plurality of elongated straight beam sections of the MEMS resonators; and
sense circuitry, coupled to the sense electrodes, to provide an output signal. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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Specification