Lithographic apparatus, radiation beam inspection device, method of inspecting a beam of radiation and device manufacturing method
First Claim
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1. A lithographic projection apparatus, comprising:
- a patterning device that modulates a beam of radiation;
a projection system that projects the modulated beam onto a target portion of a substrate; and
a radiation beam inspection device that comprises, a barrier to the radiation beam having an aperture that permits a portion of the radiation beam to pass through the barrier, and a radiation sensor that detects intensity of the radiation passing through the aperture and a position, relative to the aperture, at which the radiation passing through the aperture is incident on the radiation sensor.
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Abstract
A lithographic apparatus having a radiation beam inspection device comprising a barrier to the beam of radiation, the barrier having an aperture through which a portion of the beam of radiation passes; and a radiation sensor that determines the intensity of the radiation passing through the aperture and the position, relative to the aperture, of the point at which the radiation is incident on the radiation sensor.
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Citations
22 Claims
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1. A lithographic projection apparatus, comprising:
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a patterning device that modulates a beam of radiation;
a projection system that projects the modulated beam onto a target portion of a substrate; and
a radiation beam inspection device that comprises, a barrier to the radiation beam having an aperture that permits a portion of the radiation beam to pass through the barrier, and a radiation sensor that detects intensity of the radiation passing through the aperture and a position, relative to the aperture, at which the radiation passing through the aperture is incident on the radiation sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A radiation beam inspection device, comprising
a radiation barrier having an aperture that permits a portion of a beam of radiation that is incident on the radiation beam inspection device to pass through the barrier; - and
a radiation sensor that detects an intensity of the radiation passing through the aperture and the position, relative to the aperture, at which the radiation passing through the aperture is incident on the radiation sensor. - View Dependent Claims (17)
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18. A method of inspecting a beam of radiation, comprising:
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inspecting at least a portion of the beam of radiation using a radiation beam inspection device that comprises a barrier to the radiation, the barrier having an aperture that permits a portion of the radiation beam to pass through the barrier, and a radiation sensor;
using the radiation sensor to detect an intensity of the beam of radiation passing through the aperture and a position, relative to the aperture, at which the beam of radiation passing through the aperture is incident on the radiation sensor. - View Dependent Claims (19, 20, 21, 22)
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Specification