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Apparatus and methods for reducing non-cyclic non-linear errors in interferometry

  • US 20070002330A1
  • Filed: 06/22/2006
  • Published: 01/04/2007
  • Est. Priority Date: 06/29/2005
  • Status: Active Grant
First Claim
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1. An interferometry system, comprising:

  • an interferometer configured to direct a first beam and a second beam derived from common light source along different paths and to combine the two beams to form an output beam having a phase related to an optical path difference between the different paths, wherein the path of the first beam contacts a measurement object; and

    an assembly positioned in the path of the first beam and configured to reduce a shear of the first beam caused by a variation in the orientation of the measurement object relative to the interferometer as it propagates within the interferometer after contacting the measurement object.

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