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Wafer Support Tool for Heat Treatment and Heat Treatment Apparatus

  • US 20070006806A1
  • Filed: 03/22/2004
  • Published: 01/11/2007
  • Est. Priority Date: 03/26/2003
  • Status: Active Grant
First Claim
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1. A wafer support tool for heat treatment comprising:

  • a plurality of wafer support members for supporting a wafer to be heat treated; and

    a support member holder for holding the wafer support members, wherein the wafer support members each has a contact portion with the wafer, at least one of the contact portions being movable relative to the support member holder.

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