Low vapor pressure gas delivery system and apparatus
First Claim
1. A system for transporting a low vapor pressure fluid and manufacturing a low vapor pressure stream containing primarily vapor, wherein the stream containing primarily vapor is lean in low volatility contaminants, and delivering the stream containing primarily vapor to a point of use, comprising:
- providing a transport vessel having a liquid phase or two-phase low vapor pressure fluid contained therein;
transferring a portion of the liquid and/or two-phase low vapor pressure fluid from said transport vessel to a vaporization vessel, wherein at least part of the liquid is vaporized;
withdrawing a stream containing primarily liquid that is enriched in low volatility contaminants from the vaporization vessel; and
withdrawing a stream containing primarily vapor that is lean in low volatility contaminants from the vaporization vessel and delivering the stream containing primarily vapor to a point of use wherein the low volatility contaminant level of the stream containing primarily vapor is maintained within a desired range.
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Accused Products
Abstract
A system and apparatus for manufacturing a low vapor pressure vapor stream lean in low volatility contaminants, and delivering same to a point of use. The system provides a transport vessel having a liquid phase or two-phase fluid held therein. The liquid and/or two-phase is transferred from said transport vessel to a vaporization vessel, wherein at least part of the liquid is vaporized. A liquid stream that is enriched in low volatility contaminants is withdrawn from the vaporization vessel, and a stream that is lean in low volatility contaminants is withdrawn from the vaporization vessel. The low vapor pressure stream is delivered to a point of use and the purity is maintained within a desired range.
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Citations
31 Claims
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1. A system for transporting a low vapor pressure fluid and manufacturing a low vapor pressure stream containing primarily vapor, wherein the stream containing primarily vapor is lean in low volatility contaminants, and delivering the stream containing primarily vapor to a point of use, comprising:
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providing a transport vessel having a liquid phase or two-phase low vapor pressure fluid contained therein;
transferring a portion of the liquid and/or two-phase low vapor pressure fluid from said transport vessel to a vaporization vessel, wherein at least part of the liquid is vaporized;
withdrawing a stream containing primarily liquid that is enriched in low volatility contaminants from the vaporization vessel; and
withdrawing a stream containing primarily vapor that is lean in low volatility contaminants from the vaporization vessel and delivering the stream containing primarily vapor to a point of use wherein the low volatility contaminant level of the stream containing primarily vapor is maintained within a desired range. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. The apparatus for manufacturing a low vapor pressure stream containing primarily vapor, wherein the stream containing primarily vapor is lean in low volatile contaminants, comprising:
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a transport vessel having a liquid phase or two-phase fluid therein;
a vaporization vessel, to which the liquid phase or two-phase fluid is transferred and at least partially vaporized;
means for controlling the energy delivered to said vaporization vessel;
a first conduit connected to a lower part of the vaporization vessel through which a stream containing primarily liquid enriched in low volatile contaminants is withdrawn; and
aa delivery panel connected via a second conduit to an upper part of the vaporization vessel through which a low vapor pressure stream containing primarily vapor is withdrawn and routed to a point of use, wherein the purity of the low vapor pressure stream containing primarily vapor is maintained within a desired range. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification