Substrate handler, lithographic apparatus and device manufacturing method
First Claim
1. A substrate handler for handling a substrate, comprising:
- a conditioning device for conditioning said substrate on a support surface; and
a displacing device configured to displace said substrate in a direction substantially parallel to said support surface, wherein said displacing device is configured to displace said substrate during the conditioning process from one conditioning position to one or more other conditioning positions.
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Abstract
Embodiments of the invention relates to a substrate handler for handling a substrate, including a conditioning device for conditioning the substrate. In an embodiment, the substrate handler includes a displacing device configured to displace the substrate in a direction substantially parallel to the support surface, wherein the displacing device is configured to displace the substrate during the conditioning process from one conditioning position to one or more other conditioning positions. According to another embodiment of the invention, the substrate handler includes a float device for providing an air bed above a support surface of the substrate handler, the substrate handler being configured to support the substrate on an air bed during conditioning of the substrate.
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Citations
26 Claims
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1. A substrate handler for handling a substrate, comprising:
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a conditioning device for conditioning said substrate on a support surface; and
a displacing device configured to displace said substrate in a direction substantially parallel to said support surface, wherein said displacing device is configured to displace said substrate during the conditioning process from one conditioning position to one or more other conditioning positions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 11)
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- 9. A substrate handler for handling a substrate, comprising a conditioning device for conditioning said substrate and a float device for providing an air bed above a support surface of said substrate handler, said substrate handler being configured to keep said substrate floating on said air bed during conditioning of said substrate.
- 13. A method for manufacturing a device comprising conditioning a substrate being supported on a support surface of a substrate handler, and, during said conditioning, displacing said substrate from one conditioning position to one or more other conditioning positions.
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22. A method for manufacturing a device comprising:
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conditioning a substrate being supported on a support surface of a substrate handler; and
floating said substrate on an air bed above said support surface during conditioning of said substrate. - View Dependent Claims (23, 24, 26)
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Specification