Moveable micro-electromechanical device
First Claim
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1. A MEMS device, comprising:
- a first plate;
a second plate defining a cavity with the first plate;
a first transducer configured to cause a first relative movement between the first and second plates; and
a second transducer configured to cause a second relative movement between the first and second plates.
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Abstract
A MEMS device is provided. The MEMS device may include a first plate and a second plate defining a cavity with the first plate. The MEMS device may also include a first transducer configured to cause a first relative movement between the first and second plates and a second transducer configured to cause a second relative movement between the first and second plates..
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Citations
33 Claims
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1. A MEMS device, comprising:
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a first plate;
a second plate defining a cavity with the first plate;
a first transducer configured to cause a first relative movement between the first and second plates; and
a second transducer configured to cause a second relative movement between the first and second plates. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of manufacturing a MEMS device, the method comprising:
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positioning a first plate over a substrate;
positioning a second plate over the first plate to define a cavity between the first plate and the second plate;
configuring a first transducer to cause a first relative movement between the first plate and the second plate; and
configuring a second transducer to cause a second relative movement between the first plate. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A MEMS device comprising:
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first and second means for defining a cavity;
means for causing a first movement between the first and second means for defining the cavity; and
means for causing a second movement between the first and second means for defining the cavity. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33)
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Specification