Moveable micro-electromechanical device

• US 20070008607A1
• Filed: 09/08/2006
• Published: 01/11/2007
• Est. Priority Date: 04/08/1998
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Iridigm Display Corporation (Qualcomm, Inc.)
• Inventors: Miles, Mark
• Granted Patent: US 7,301,704 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: G02B 19/0019 having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/007 the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00
• CPC Class Codes: G02B 26/0816 by means of one or more reflecting elements
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 27/0068 having means for controlling the degree of correction, e.g. using phase modulators, movable elements controlling the phase of light using moving or deformable elements G02B26/06
• CPC Class Codes: G02B 5/201 in the form of arrays
• CPC Class Codes: G02F 1/0128 based on electro-mechanical, magneto-mechanical, elasto-optic effects
• CPC Class Codes: G02F 2203/12 spatial light modulator
• CPC Class Codes: G09G 2300/0426 Layout of electrodes and connections
• CPC Class Codes: G09G 2300/0469 Details of the physics of pixel operation
• CPC Class Codes: G09G 2300/08 Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
• CPC Class Codes: G09G 2300/0809 Several active elements per pixel in active matrix panels
• CPC Class Codes: G09G 2300/0842 forming a memory circuit, e.g. a dynamic memory with one capacitor
• CPC Class Codes: G09G 2300/088 using a non-linear two-terminal element
• CPC Class Codes: G09G 3/2014 : by modulation of the duration of a single pulse during which the logic level remains constant
• CPC Class Codes: G09G 3/22 : using controlled light sources
• CPC Class Codes: G09G 3/3433 : using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices using liquid crystal devices G09G3/36; using electrochromic devices G09G3/38
• CPC Class Codes: G09G 3/3466 : based on interferometric effect
• CPC Class Codes: Y10T 29/49002 : Electrical device making
• CPC Class Codes: Y10T 29/4913 : Assembling to base an electrical component, e.g., capacitor, etc.

Abstract

A MEMS device is provided. The MEMS device may include a first plate and a second plate defining a cavity with the first plate. The MEMS device may also include a first transducer configured to cause a first relative movement between the first and second plates and a second transducer configured to cause a second relative movement between the first and second plates..

Claims

1. A MEMS device, comprising:

a first plate;

a second plate defining a cavity with the first plate;

a first transducer configured to cause a first relative movement between the first and second plates; and

a second transducer configured to cause a second relative movement between the first and second plates.

2. The device of claim 1, wherein the second plate is suspended with respect to the first plate.

3. The device of claim 1, further comprising a substrate, wherein the first plate is positioned between the substrate and the second plate.

4. The device of claim 2, wherein the first plate and the second plate are positioned to move relative to each other.

5. The device of claim 3, wherein the first relative movement comprises the first plate moving toward the substrate and away from the second plate.

6. The device of claim 5, wherein the second relative movement comprises the second plate moving toward the first plate and the substrate.

7. The device of claim 4, wherein the first and second transducers are energized to cause the first and second relative movements.

8. The device of claim 7, wherein the second relative movement is substantially independent of the first relative movement.

9. The device of claim 1, wherein each of the first transducer and the second transducer comprises at least one of a first electrode and a second electrode.

10. The device of claim 9, wherein the first electrode comprises the second electrode.

11. The device of claim 1, wherein each of the first transducer and the second transducer comprises at least one driver circuit configured to apply at least one voltage signal to at least one of the first and second plates.

12. The device of claim 11, wherein the driver circuit comprises a plurality of transistors connected in parallel to at least one voltage source, each transistor being further connected to at least one of the first plate and the second plate.

13. The device of claim 12, wherein the driver circuit applies a first of the at least one voltage signal to the first plate via a first one of the plurality of transistors, and wherein the driver circuit applies a second of the at least one voltage signal via a second one of the plurality of transistors, wherein applying the first and second voltage signals occurs separately and at different times.

14. The device of claim 1, wherein the first plate comprises a partially reflective surface and the second plate comprises a substantially fully reflective surface.

15. The device of claim 1, wherein the first plate and second plate comprise an interferometric modulator configured to cause light interference within the cavity.

16. A method of manufacturing a MEMS device, the method comprising:

positioning a first plate over a substrate;

positioning a second plate over the first plate to define a cavity between the first plate and the second plate;

configuring a first transducer to cause a first relative movement between the first plate and the second plate; and

configuring a second transducer to cause a second relative movement between the first plate.

17. The method of claim 16, further comprising positioning the second plate substantially in parallel with the first plate.

18. The method of claim 16, further comprising connecting the first transducer to at least one of the first and second plates.

19. The method of claim 16, further comprising connecting the second transducer to at least one of the first and second plates.

20. The method of claim 16, further comprising coupling the first plate and the second plate to at least one support member positioned over the substrate.

21. The method of claim 16, wherein configuring the first transducer comprises providing a driver circuit configured to apply a plurality of voltages to the first and second plates.

22. The method of claim 21, wherein providing the driver circuit comprises providing a plurality of transistors connected to a plurality of voltage sources.

23. The method of claim 22, wherein configuring the first transducer further comprises electrically connecting the plurality of transistors to the first plate and the second plate.

24. The method of claim 16, wherein the positioning the first plate comprises a placing a partially reflective membrane, and wherein positioning the second plate comprises placing a substantially fully reflective membrane.

25. The method of claim 16, wherein positioning the first plate and second plate comprises forming an interferometric modulator configured to cause light interference within the cavity.

26. A MEMS device comprising:

first and second means for defining a cavity;

means for causing a first movement between the first and second means for defining the cavity; and

means for causing a second movement between the first and second means for defining the cavity.

27. The device of claim 26, wherein the first and second means for defining the cavity comprise means for storing electrostatic charge.

28. The device of claim 26, wherein the first and second means for defining the cavity comprise a first and second plate, respectively.

29. The device of claim 26, wherein the means for causing the first movement comprises a first electrode.

30. The device of claim 29, wherein the means for causing the second movement comprises a second electrode.

31. The device of claim 30, further comprising means for applying a plurality of voltages to the first and second means for defining the cavity.

32. The device of claim 26, wherein the first and second means for defining the cavity comprise a partially reflective mirror and a mirror, respectively.

33. The device of claim 26, wherein the first and second means for defining the cavity comprise an interferometric modulator configured to cause light interference within the cavity.