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Ultraviolet laser apparatus and exposure apparatus using same

  • US 20070008609A1
  • Filed: 09/13/2006
  • Published: 01/11/2007
  • Est. Priority Date: 03/11/1998
  • Status: Active Grant
First Claim
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1. A laser apparatus comprising:

  • a laser generating portion that generates pulse light having a single wavelength within a range from an infrared band to a visible band;

    an optical amplifier optically connected to the laser generating portion, that includes a plurality of fiber optical amplifiers to amplify the pulse light in plural times; and

    a wavelength converting portion optically connected to the optical amplifier, that includes cylindrical lenses and a plurality of non-linear optical crystals to wavelength-convert the amplified pulse light into ultraviolet light, the amplified pulse light being incident on one of the plurality of non-linear optical crystals through the cylindrical lenses.

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