Plasma Treatment at Film Layer to Reduce Sheet Resistance and to Improve Via Contact Resistance
First Claim
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1. A system for manufacturing a semiconductor device, comprising:
- means for forming an insulating layer over a substrate;
means for forming an agglutinating layer over the insulating layer;
means for plasma treating the agglutinating layer to enlarge its grain size;
means for forming a barrier layer over the plasma-treated agglutinating layer; and
means for forming a conductive layer over the barrier layer.
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Abstract
A method of manufacturing a semiconductor device contact including forming an insulating layer over a substrate and forming an agglutinating layer over the insulating layer. The agglutinating layer is then exposed to a plasma treatment. A barrier layer is formed over the plasma-treated agglutinating layer, and a conductive layer is formed over the barrier layer.
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Citations
20 Claims
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1. A system for manufacturing a semiconductor device, comprising:
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means for forming an insulating layer over a substrate;
means for forming an agglutinating layer over the insulating layer;
means for plasma treating the agglutinating layer to enlarge its grain size;
means for forming a barrier layer over the plasma-treated agglutinating layer; and
means for forming a conductive layer over the barrier layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A deposition cluster system for manufacturing a semiconductor device, comprising:
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a first processing chamber configured to form an insulating layer over a substrate;
a second processing chamber configured to form an agglutinating layer over the insulating layer;
a third processing chamber configured to plasma treat the agglutinating layer to enlarge its grain size; and
a fourth processing chamber configured to form a barrier layer over the plasma-treated agglutinating layer. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification