Control method, temperature control method, adjustment method, temperature controller, program, recording medium and heat treatment device

• US 20070010403A1
• Filed: 06/28/2006
• Published: 01/11/2007
• Est. Priority Date: 07/04/2005
• Status: Active Grant

• Current Assignee: Omron Corporation
• Original Assignee: Omron Corporation
• Inventors: Yamada, Takaaki, Tanaka, Masahito, Wakabayashi, Takeshi, Nanno, Ikuo, Iwai, Yosuke
• Granted Patent: US 7,536,230 B2
• Time in Patent Office: Days
• US Class Current: 505/430
• CPC Class Codes: G05D 23/1917 using digital means

Abstract

When a work is set on a hot plate and a heat treatment is started and the like, an addition waveform of a target temperature is formed based on a previously formed data of an adjustment value, and a temperature is controlled by adding the addition waveform to the target temperature SP, and with the data of the adjustment value, the variation in temperature of the work is prevented using an interference matrix showing a relation between the target temperature SP and the temperature of the work.

Claims

1. A control method for controlling a physical state of a processing device for processing a target object so that detected information of the physical state of the processing device detected at a plurality of measure points conform with target information, wherein

the target information is adjusted so that a physical state of the target object becomes a desired state using relation information showing a relation between the target information and the physical state of the target object.

2. A temperature control method for controlling a temperature of a processing device for processing a target object so that each of detected temperatures of the processing device detected at a plurality of measure points conform with each of a plurality of target temperatures, wherein

the target temperature is adjusted so that a temperature of the target object becomes a desired temperature state using relation information showing a relation between the target temperature and the temperature of the target object.

3. The temperature control method according to claim 2, wherein adjustment information is found based on the relation information and temperature distribution information of the target object before adjustment of the target temperature, and the target temperature is adjusted according to that adjustment information.

4. The temperature control method according to claim 3 comprising:

a first step of finding the relation information showing the relation between the target temperature and a temperature of the target object at each of the plurality of measure points, based on measured temperatures of the temperature change of the target object at the plurality of measure points when the target temperature is changed;

a second step of finding the temperature distribution information, based on measured temperatures of the target object at the plurality of measure points before the adjustment of the target temperature;

a third step of finding the adjustment information, based on the relation information and the temperature distribution information provided by the first and second steps, respectively; and

a fourth step of adjusting the target temperature based on the adjustment information provided by the third step.

5. The temperature control method according to claim 4, wherein

at the first step of finding the relation information, a stepped response waveform of the measured temperatures of the target object at the plurality of measure points when each target temperature is changed stepwise is measured, and using the measured stepped response waveform, at least one response waveform of a pulsed response waveform with respect to a change of a pulsed target temperature and a triangular response waveform with respect to a change of a triangular target temperature is composed.

6. The temperature control method according to claim 4, wherein

at the first step of finding the relation information, a pulsed response waveform or a triangular response waveform of measured temperatures of the target object at the plurality of measure points when the target temperature is changed into the form of a pulse or triangle individually is measured.

7. The temperature control method according to claim 5, wherein

at the first step of finding the relation information, at least one response waveform of the plurality of temporally different pulsed response waveforms or the plurality of temporally different triangular response waveforms are composed, and based on the composed response waveforms, a matrix as the relation information is found.

8. The temperature control method according to claim 7, wherein

the adjustment information is an adjustment value at a predetermined point for each of the plurality of target temperatures, and at the third step, the adjustment value is calculated based on an inverse matrix of the matrix and the temperature distribution information.

9. The temperature control method according to claim 8, wherein

at the third step, at least the adjustment value is randomly changed and an optimal value of the adjustment value is searched by a searching method using an evaluation formula including the matrix.

10. An adjustment device for controlling a temperature of a processing device for processing a target object so that each of temperatures of the processing device detected at a plurality of measure points conform with each of a plurality of target temperatures, and finding adjustment information of a temperature controller for adjusting the target temperature according to the adjustment information, comprising an calculating device for calculating the adjustment information for adjusting the temperature of the target object to a desired temperature state, using relation information showing a relation between the target temperature and the temperature of the target object.

11. The adjustment device according to claim 10, wherein the calculating device calculates the adjustment information based on the relation information and temperature distribution information of the target object before adjustment of the target temperature.

12. The adjustment device according to claim 11, wherein the calculating device comprises a first calculating unit for calculating the relation information showing a relation between the target temperature and temperatures of the target object at the plurality of measure points based on measured temperatures of the target object at the plurality of measure points when the target temperature is changed, and a second calculating unit for calculating the temperature distribution information based on the measured temperatures of the target object at the plurality of measure points before adjustment of the target temperature.

13. The adjustment device according to claim 12, wherein the first calculating unit composes at least one response waveform of a pulsed response waveform with respect to the pulsed change of the target temperature and the triangular response waveform with respect to the triangular change of the target temperature, using the stepped response waveform of the measured temperatures of the target object at the plurality of measure points when the target temperature is individually changed stepwise.

14. The adjustment device according to claim 12, wherein the first calculating unit calculates the pulsed response waveform or the triangular response waveform of the target object at the plurality of measure points when the target temperature is individually changed into the form of a pulse or triangle.

15. The adjustment device according to claim 13, wherein the first calculating unit composes at least one response waveforms of the plurality of temporally different pulsed response waveforms or the plurality of temporally different rectangular response waveforms, and calculates a matrix as the relation information based on the composed response waveform.

16. The adjustment device according to claim 15, wherein the adjustment information is an adjustment value at a predetermined point for each of the plurality of target temperatures, and the calculating device calculates the adjustment value based on an inverse matrix of the matrix and the temperature distribution information.

17. The adjustment device according to claim 16, wherein the calculating device changes at least the adjustment value randomly, and searches an optimal value of the adjustment value by a searching method using an evaluation formula including the matrix.

19. The adjustment device according to claim 12, wherein the desired temperature state is a state in which a variation in measured temperatures of the target object at the plurality of measure points is prevented, and the target object is put on the processing device and a heat treatment is performed.

20. The adjustment device according to claim 11, wherein the temperature distribution information is set as corresponding set information and the calculating device calculates the adjustment information based on the relation information and the set information.

21. The adjustment device according to claim 10, wherein the temperature controller controls the temperature based on deviation between the target temperature and the detected temperature, and adjusts at least one of the target temperature and the detected temperature according to the adjustment information.

23. A temperature adjustment device for a temperature of a processing device for processing a target object so that each of temperatures of the processing device detected at a plurality of measure points conform with each of a plurality of target temperatures, wherein

the target temperature is adjusted according to the adjustment information found by the adjustment device according to claim 10.

36. A heat treatment comprising the temperature controller and the processing device according to claim 23, operating device for heating and/or cooling the processing device by an output of the temperature controller, and a temperature detecting device for detecting the temperatures of the processing device at a plurality of detection points.

18. An adjustment device for controlling a temperature of a processing device for processing a target object so that each of temperatures of the processing device detected at a plurality of measure points conform with each of a plurality of target temperatures and finding the adjustment information of a temperature controller for controlling the garget temperature according to the adjustment information, comprising a calculating device for calculating the adjustment information for adjusting the temperature of the target object to a desired temperature state, based on the measured temperatures of the target object at the plurality of measure points when the target temperature is changed and the measured temperatures of the target object at the plurality of measure points before adjustment of the target temperature.

22. An adjustment device for controlling a temperature of a processing device for processing a target object by applying an operation amount to an operating device so that each of temperatures of the processing device detected at a plurality of measure points conform with each of a plurality of target temperatures, and finding the adjustment information of a temperature controller for adjusting the operation amount so that the temperature of the target object becomes a desired temperature state according to the adjustment information, comprising

a calculating device for calculating the adjustment information using relation information showing a relation between the operation amount and the temperature of the target object.

24. A temperature adjustment device for a temperature of a processing device for processing a target object so that each of temperatures of the processing device detected at a plurality of measure points conform with each of a plurality of target temperatures, and adjusting the target temperature according to adjustment information, comprising

an calculating device for calculating the adjustment information for adjusting the temperature of the target object to a desired temperature state, using relation information showing a relation between the target temperature and the temperature of the target object.

25. A program for controlling a temperature of a processing device for processing a target object so that each of temperatures of the processing device detected at a plurality of measure points conform with each of a plurality of target temperatures, and finding the adjustment information of the temperature controller for adjusting the target temperature according to adjustment information, by which a computer executes

a first step of calculating relation information showing a relation between the target temperature and the temperature of the target object, and

a second step of calculating the adjustment information for adjusting the temperature of the target object to a desired temperature state based on the relation information and the temperature distribution information of the target object before adjustment of the target temperature.

26. The program according to claim 25, wherein the temperature distribution information is set as corresponding set information, and at the second step, the adjustment information is calculated based on the relation information and the set information.

27. The program according to claim 25, wherein

the first step calculates the relation information showing the relation between the target temperature and the temperatures of the target object at the plurality of measuring points, based on the measured temperatures of the target object at the plurality of measure points when the target temperature is changed, and

the second step calculates the temperature distribution information based on the measured temperatures of the target object at the plurality of measure points before adjustment of the target temperature.

28. The program according to claim 27, wherein

at the first step, at least one response waveform of a pulsed response waveform with respect to a pulsed change of a target temperature and triangular response waveform with respect to a trianbular change of a target temperature is composed, using a stepped response waveform of the measured temperatures of the target object at the plurality of measure points when the target temperature is individually changed stepwise.

29. The program according to claim 27, wherein

at the first step, a pulsed response waveform or a triangular response waveform of measured temperatures of the target object at the plurality of measure points is measured when the target temperature is changed into the form of a pulse or triangle individually.

30. The temperature control method according to claim 28, wherein

at the first step, at least one response waveform of the plurality of temporally different pulsed response waveforms and the plurality of temporally different triangular response waveforms is composed, and based on the composed response waveform, a matrix as the relation information is found.

31. The program according to claim 30, wherein

the adjustment information is an adjustment value at a predetermined point for each of the plurality of target temperatures, and at the second step, the adjustment value is calculated based on an inverse matrix of the matrix and the temperature distribution information.

32. The program according to claim 31, wherein

at the second step, at least an adjustment value is randomly changed and an optimal value of the adjustment value is searched by a searching method using an evaluation formula including the matrix.

34. The program according to claim 27, wherein the desired temperature state is a state in which a variation in measured temperatures of the target object at the plurality of measure points is prevented, and the target object is put on the processing device and a heat treatment is performed.

35. A recording medium recording the program according to claim 25 so as to be read by a computer.

33. A program for controlling a temperature of a processing device for processing a target object so that each of temperatures of the processing device detected at a plurality of measure points conform with each of a plurality of target temperatures, and finding the adjustment information of the temperature controller for adjusting the target temperature according to the adjustment information, by which a computer executes

a step of calculating the adjustment information for adjusting the temperature of the target object to a desired temperature state based on measured temperatures of the target object at the plurality of measure points when the target temperature is changed and measured temperatures of the target object at the plurality of measure points before adjustment of the target temperature.