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Calibration for Automated Microassembly

  • US 20070012084A1
  • Filed: 08/14/2006
  • Published: 01/18/2007
  • Est. Priority Date: 06/25/2004
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a substrate;

    a first layer located on the substrate;

    a second layer located over the first layer;

    an apparatus comprising at least a portion of the second layer; and

    calibration means, wherein the calibration means includes an elastically deformable member comprising at least a portion of the second layer and having at least one feature dimension other than thickness that is less than about 50 microns, wherein the elastically deformable member is elastically deformable in response to contact with a micro-mechanical end-effector having at least one feature dimension that is less than about 50 microns.

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