Calibration for Automated Microassembly
First Claim
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1. An apparatus, comprising:
- a substrate;
a first layer located on the substrate;
a second layer located over the first layer;
an apparatus comprising at least a portion of the second layer; and
calibration means, wherein the calibration means includes an elastically deformable member comprising at least a portion of the second layer and having at least one feature dimension other than thickness that is less than about 50 microns, wherein the elastically deformable member is elastically deformable in response to contact with a micro-mechanical end-effector having at least one feature dimension that is less than about 50 microns.
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Abstract
An apparatus including a micro-mechanical calibration member having at least a portion that is elastically biasable away from a neutral position in response to mechanical contact. The apparatus may also include a fixed member proximate the micro-mechanical calibration member which may be referenced to automatically detect deflection of the micro-mechanical calibration member away from the neutral position. The micro-mechanical calibration member may also be configured to receive a micro-mechanical contacting member to provide the mechanical contact employed to bias the micro-mechanical calibration member away from the neutral position.
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Citations
20 Claims
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1. An apparatus, comprising:
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a substrate;
a first layer located on the substrate;
a second layer located over the first layer;
an apparatus comprising at least a portion of the second layer; and
calibration means, wherein the calibration means includes an elastically deformable member comprising at least a portion of the second layer and having at least one feature dimension other than thickness that is less than about 50 microns, wherein the elastically deformable member is elastically deformable in response to contact with a micro-mechanical end-effector having at least one feature dimension that is less than about 50 microns. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification