ELECTROLUMINESCENCE DEVICE, METHOD OF MANUFACTURING ELECTROLUMINESCENCE DEVICE, AND ELECTRONIC APPARATUS

• US 20070015429A1
• Filed: 07/10/2006
• Published: 01/18/2007
• Est. Priority Date: 07/15/2005
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: MATSUMOTO, Tomotaka, MAEDA, Tsuyoshi
• Granted Patent: US 8,102,111 B2
• Time in Patent Office: Days
• US Class Current: 445/24
• CPC Class Codes: H10K 2102/351 Thickness
• CPC Class Codes: H10K 50/81 Anodes
• CPC Class Codes: H10K 50/816 Multilayers, e.g. transparent multilayers
• CPC Class Codes: H10K 50/818 Reflective anodes, e.g. ITO combined with thick metallic layers
• CPC Class Codes: H10K 50/852 comprising a resonant cavity structure, e.g. Bragg reflector pair
• CPC Class Codes: H10K 59/35 comprising red-green-blue [RGB] subpixels
• CPC Class Codes: H10K 59/38 comprising colour filters or colour changing media [CCM]

Abstract

Provided is a method of manufacturing an electroluminescence device, in which a plurality of pixel forming regions is formed on a substrate, a light emitting element, in which an anode having a light transmission property, a light emission function layer including at least a light emitting layer and a cathode are laminated, is provided in each of the plurality of pixel forming regions, the pixel forming regions include a pixel forming region of first color and a pixel forming region of second color different from the first color, and the anode includes a first anode formed in the pixel forming region of the first color with a first thickness and a second anode formed in the pixel forming region of the second color with a second thickness, including: forming a first transparent conductive film in the pixel forming region of the first color with a thickness obtained by subtracting the second thickness from the first thickness; and forming a second transparent conductive film in the pixel forming region of the second color with the second thickness.

Claims

1. A method of manufacturing an electroluminescence device, in which a plurality of pixel forming regions is formed on a substrate, a light emitting element, in which an anode having a light transmission property, a light emission function layer including at least a light emitting layer and a cathode are laminated, is provided in each of the plurality of pixel forming regions, the pixel forming regions include a pixel forming region of first color and a pixel forming region of second color different from the first color, and the anode includes a first anode formed in the pixel forming region of the first color with a first thickness and a second anode formed in the pixel forming region of the second color with a second thickness, comprising:

forming a first transparent conductive film in the pixel forming region of the first color with a thickness obtained by subtracting the second thickness from the first thickness; and

forming a second transparent conductive film in the pixel forming region of the second color with the second thickness.

2. A method of manufacturing an electroluminescence device, in which a plurality of pixel forming regions is formed on a substrate, a light emitting element, in which an anode having a light transmission property, a light emission function layer including at least a light emitting layer and a cathode are laminated, is provided in each of the plurality of pixel forming regions, the pixel forming regions include a pixel forming region of first color, a pixel forming region of second color different from the first color and a pixel forming region of third color different from the first and second colors, and the anode includes a first anode formed in the pixel forming region of the first color with a first thickness, a second anode formed in the pixel forming region of the second color with a second thickness and a third anode formed in the pixel forming region of the third color with a third thickness, comprising:

forming a first transparent conductive film in the pixel forming region of the first color with a thickness obtained by subtracting the second thickness from the first thickness;

forming a second transparent conductive film in the pixel forming region of the second color with a thickness obtained by subtracting the third thickness from the second thickness; and

forming a third transparent conductive film in the pixel forming region of the three color with the third thickness.

3. The method of manufacturing the electroluminescence device according to claim 2, wherein the light emitting element is an electroluminescence element in which an optical resonator has a lower reflection layer formed between the anode and the substrate, the first color is red, the second color is green, the third color is blue, and the forming of the first to third transparent conductive films are performed using a photolithographic process.

4. An electroluminescence device, wherein, in each of a plurality of pixel forming regions formed on a substrate, a light emitting element, in which an anode having a light transmission property, a light emission function layer including at least a light emitting layer and a cathode are laminated, is provided, the pixel forming regions include a pixel forming region of first color, a pixel forming region of second color different from the first color and a pixel forming region of third color different from the first and second colors, the anode includes a first anode formed in the pixel forming region of the first color with a first thickness, a second anode formed in the pixel forming region of the second color with a second thickness and a third anode formed in the pixel forming region of the third color with a third thickness, the first anode is formed by laminating a first transparent conductive film having a thickness obtained by subtracting the second thickness from the first thickness, a second transparent conductive film having a thickness obtained by subtracting the third thickness from the second thickness and a third transparent conductive film having the three thickness, the second anode is formed by laminating the second transparent conductive film and the third transparent conductive film, and the third anode is formed of the third transparent conductive film.

5. The electroluminescence device according to claim 4, wherein light emitted from the light emitting layer is output from the substrate to the light emitting layer.

6. The electroluminescence device according to claim 4, wherein the light emitting element has an optical resonator having a lower reflection layer formed between the anode and the substrate and an insulating protective layer which has a light transmission property and covers the lower reflection layer is formed between the anode and the lower reflection layer.

7. The electroluminescence device according to claim 6, wherein the refractive index of the insulating protective layer is smaller than that of the anode.

8. The electroluminescence device according to claim 4, wherein the thicknesses of the first anode, the second anode and the third anode are set such that the optical distance of the optical resonator corresponds to any one of the wavelengths of red light, green light and blue light.

17. An electronic apparatus comprising the electroluminescence device according to claim 4.

9. A electroluminescence device, wherein each of a plurality of pixels formed on a substrate has a light emission function layer interposed between a first electrode and a second electrode, the plurality of pixels includes at least a first pixel, a second pixel and a third pixel, the first electrode of the first pixel is formed by laminating a first conductive film having high etching selectivity and a second conductive film having low etching selectivity, the first electrode of the second pixel is formed of the first conductive film, and the first electrode of the third pixel is formed of the second conductive film.

10. The electroluminescence device according to claim 9, wherein the first conductive film and the second conductive film are a transparent conductive film.

11. The electroluminescence device according to claim 9, wherein the film thickness of the first conductive film is different from that of the second conductive film.

12. The electroluminescence device according to claim 9, wherein the first electrode in the first pixel is formed of the first conductive film and the second conductive film laminated on the first conductive film.

13. The electroluminescence device according to claim 9, wherein a reflection film is formed between the substrate and the first electrode.

14. The electroluminescence device according to claim 9, wherein a color emitted from the first pixel, a color emitted from the second pixel and a color emitted from the third pixel are different from one another.

15. The electroluminescence device according to claim 9, wherein the wavelength of light emitted from the light emission function layer in the first pixel, the wavelength of light emitted from the light emission function layer in the second pixel and the wavelength of light emitted from the light emission function layer in the third pixel are different from one another.

16. The electroluminescence device according to claim 9, wherein each of the plurality of pixels includes a color layer which faces the light emission function layer and the color of the color layer in the first pixel, the color of the color layer in the second pixel and the color of the color layer in the third pixel are different from one another.

18. A method of manufacturing an electroluminescence device, wherein each of a plurality of pixels formed on a substrate has a light emission function layer interposed between a first electrode and a second electrode, the plurality of pixels includes at least a first pixel, a second pixel and a third pixel, and a process of forming the first electrode includes forming a first conductive film in the first pixel and the second pixel and forming a second conductive film having etching selectivity lower than that of the first conductive film in the first and third pixels.

19. The method of manufacturing the electroluminescence device according to claim 18, wherein the process of forming the first electrode includes patterning the first conductive film after forming the first conductive film on the substrate and forming the second conductive film on the first conductive film patterned by the patterning of the first conductive film and the substrate and patterning the second conductive film.