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Compact pressure-sensing device

  • US 20070016384A1
  • Filed: 04/10/2006
  • Published: 01/18/2007
  • Est. Priority Date: 04/08/2005
  • Status: Active Grant
First Claim
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1. A sensing device comprising:

  • a substrate;

    a beam formed on the substrate, the beam being capable of deflecting according to different pressures applied to different beam surfaces; and

    piezo-resistive sensing elements coupled to the beam, the piezo-resistive sensing elements detecting beam deflection and generating an electrical signal corresponding to the beam deflection.

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