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Device for improving plasma activity PVD-reactors

  • US 20070017804A1
  • Filed: 07/21/2006
  • Published: 01/25/2007
  • Est. Priority Date: 07/22/2005
  • Status: Abandoned Application
First Claim
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1. Device for improving plasma activity in a coating reactor containing substrates to be coated, where a primary plasma is created by a DC or AC voltage applied between the substrates and at least one additional electrode, said device comprising a thermionic emitter, heated by either DC or AC current or combinations thereof.

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