Power semiconductor device with current sense capability
First Claim
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1. A power semiconductor device comprising:
- a power device formed in a semiconductor region of one conductivity;
a current sense device formed in said semiconductor region, said current sense device including, an active region having a plurality of active cells, each active cell including a base region of another conductivity formed in said semiconductor region, and a conductive region of said one conductivity formed in each said base region spaced from said semiconductor region of said one conductivity by an invertible region of said another conductivity;
a MOS gate adjacent each said invertible region; and
a plurality inactive cells of said another conductivity only disposed at the outer boundary of said active region.
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Abstract
A power semiconductor device includes a power device and a current sense device formed in a common semiconductor region.
8 Citations
14 Claims
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1. A power semiconductor device comprising:
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a power device formed in a semiconductor region of one conductivity;
a current sense device formed in said semiconductor region, said current sense device including, an active region having a plurality of active cells, each active cell including a base region of another conductivity formed in said semiconductor region, and a conductive region of said one conductivity formed in each said base region spaced from said semiconductor region of said one conductivity by an invertible region of said another conductivity;
a MOS gate adjacent each said invertible region; and
a plurality inactive cells of said another conductivity only disposed at the outer boundary of said active region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification