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Nonvolatile storage array with continuous control gate employing hot carrier injection programming

  • US 20070018232A1
  • Filed: 07/25/2005
  • Published: 01/25/2007
  • Est. Priority Date: 07/25/2005
  • Status: Active Grant
First Claim
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1. A storage array comprising an array of storage cells wherein at least one of the storage cells comprises;

  • a first source/drain region underlying a first trench defined in a semiconductor substrate;

    a second source/drain region underlying a second trench in the substrate;

    a charge storage stack lining the trenches wherein the charge storage stack includes a layer of discontinuous storage elements (DSEs); and

    a control gate over at least one of the trenches;

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