Micro sensor system for liquid conductivity, temperature and depth
First Claim
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1. An apparatus for measuring conductivity, temperature and depth of a liquid, the apparatus comprising:
- a substantially planar thin-film conductivity microsensor for measuring the conductivity of the liquid;
a substantially planar thin-film resistive temperature microsensor for measuring the temperature of the liquid; and
a discrete pressure microsensor for measuring the pressure of the liquid.
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Abstract
In accordance with the present invention is a miniature planar oceanographic conductivity, temperature pressure (CTD) system based on a thin film material fabricated on a Liquid Crystalline Polymer (LCP). The micro-CTD system in accordance with the present invention analyzes water for salinity by measuring conductivity, temperature and depth.
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Citations
15 Claims
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1. An apparatus for measuring conductivity, temperature and depth of a liquid, the apparatus comprising:
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a substantially planar thin-film conductivity microsensor for measuring the conductivity of the liquid;
a substantially planar thin-film resistive temperature microsensor for measuring the temperature of the liquid; and
a discrete pressure microsensor for measuring the pressure of the liquid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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