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Micro sensor system for liquid conductivity, temperature and depth

  • US 20070018652A1
  • Filed: 02/21/2006
  • Published: 01/25/2007
  • Est. Priority Date: 02/21/2005
  • Status: Active Grant
First Claim
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1. An apparatus for measuring conductivity, temperature and depth of a liquid, the apparatus comprising:

  • a substantially planar thin-film conductivity microsensor for measuring the conductivity of the liquid;

    a substantially planar thin-film resistive temperature microsensor for measuring the temperature of the liquid; and

    a discrete pressure microsensor for measuring the pressure of the liquid.

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