METHOD AND DEVICE FOR NON-DESTRUCTIVE ANALYSIS OF PERFORATIONS IN A MATERIAL

• US 20070019187A1
• Filed: 08/09/2006
• Published: 01/25/2007
• Est. Priority Date: 06/10/1999
• Status: Active Grant

• Current Assignee: Aradigm Corporation
• Original Assignee: Aradigm Corporation
• Inventors: Srinivasan, Sudarsan, Wilbanks, Thor, Schuster, Jeffrey
• Granted Patent: US 7,301,621 B2
• Time in Patent Office: Days
• US Class Current: 356/237.600
• CPC Class Codes: B01D 2323/34 Use of radiation
• CPC Class Codes: B01D 2323/50 Control of the membrane preparation process
• CPC Class Codes: B01D 67/0034 by micromachining techniques, e.g. using masking and etching steps, photolithography
• CPC Class Codes: G01N 2021/8812 Diffuse illumination, e.g. "sky"
• CPC Class Codes: G01N 21/894 Pinholes

Abstract

Method for fabricating and inspecting small holes in a material are disclosed. The method includes directing light onto the material and through the holes formed in the material, and then collecting the light passing through the holes in the material onto a detector. The methods further include analyzing the light for properties of the holes, and modifying the process based these detected properties.

Claims

1-55. -55. (canceled)

56. A method, comprising:

directing light onto a polymer film, the light having an intensity and a wavelength sufficient to form a plurality pores within the sheet;

forming a pore array within the sheet comprising a plurality of pores at locations where the light contacts a surface of the sheet, wherein the light passes through the plurality of pores;

detecting the light passing through the plurality of pores;

analyzing the detected light to determine if the plurality of pores meet a pore size and pore shape criterion; and

moving formulation through the pores to create an aerosol.

57. The method of claim 56, further comprising:

inhaling the aerosol into lungs of a patient.

58. The method of claim 56, further comprising:

modifying the method based on whether the pore size and pore shape criterion is met.

59. The method of claim 56, wherein the light is a LASER.

60. The method of claim 56, further comprising:

repeating the directing, forming, detecting, and analyzing for each of a plurality of sheets.

61. The method of claim 56, wherein each of the plurality of pores formed has a diameter of less than about 100 microns.

62. The method of claim 59, wherein the LASER is selected from the group consisting of a UV LASER and a visible light LASER.

63. The method of claim 56, wherein the detecting comprises using a detector selected from the group consisting of a photodiode, a pyroelectric detector and a downconversion/photodiode, and wherein the analyzing comprises using a system comprising an electronic circuit.

64. The method of claim 58, wherein the modifying comprises changing one or more of the intensity, the pulse duration, and the pulse frequency of the directed light.

65. The method of claim 64, wherein the modifying comprises reducing the intensity wherein the fabrication method is essentially halted.

66. The method of claim 58, wherein the modifying comprises moving a new sheet into the drilling position.

67. The method of claim 62, wherein the UV LASER is selected from the group consisting of excimer LASERs, frequency multiplied YAG LASERs, frequency multiplied YLF LASERs.

68. The method of claim 59, wherein the LASER is a pulsed Excimer LASER.