×

NEXT PROCESS-DETERMINING METHOD, INSPECTING METHOD AND INSPECTING APPARATUS

  • US 20070019868A1
  • Filed: 09/29/2006
  • Published: 01/25/2007
  • Est. Priority Date: 03/02/2001
  • Status: Active Grant
First Claim
Patent Images

1. A next process-determining method, comprising:

  • digitizing a sample object into digital sample data;

    compressing the digital sample data into compressed digital sample data having a predetermined data format;

    calculating a difference value between a size of the compressed digital sample data and a size of reference data formed by digitizing and compressing a reference sample object in the same manner as the sample object is processed;

    identifying which of a plurality of predetermined numerical ranges the difference value corresponds to; and

    determining a predetermined process to be performed with respect to the sample object, which is associated with the identified numerical range in advance as a next process to be carried out.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×