Nanopore structure and method using an insulating substrate

• US 20070020146A1
• Filed: 06/29/2005
• Published: 01/25/2007
• Est. Priority Date: 06/29/2005
• Status: Abandoned Application

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Young, James, Schembri, Carol
• Application Number:
  US11/171,091
• Publication Number:
  US 20070020146A1
• Time in Patent Office: Days
• US Class Current: 422/82.10
• CPC Class Codes: B81B 2203/0353 Holes
• CPC Class Codes: B81C 1/00087 Holes
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: G01N 33/48721 Investigating individual macromolecules, e.g. by translocation through nanopores Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68

Abstract

A nanopore structure for conducting analysis on a molecule in solution. The nanopore structure includes an electrically insulating substrate and a membrane contacting the electrically insulating substrate. A nanopore is defined through the electrically insulating substrate and the membrane for conducting analysis on a molecule being positioned in the nanopore. Also disclosed are methods for making and using the nanopore structures.

Claims

1. A nanopore structure for conducting analysis on a molecule in solution, comprising:

a) an electrically insulating substrate, and

b) a membrane contacting the electrically insulating substrate wherein a nanopore is defined through the electrically insulating substrate and the membrane to define the nanopore structure.

2. A nanopore structure as recited in claim 1, wherein the insulating substrate comprises a material selected from the group consisting of silicon dioxide, glass, ceramic and plastic.

3. A nanopore structure as recited in claim 1, wherein the membrane comprises a material selected from the group consisting of silicon nitride, silicon dioxide, and titanium dioxide.

4. A nanostructure as recited in claim 1, wherein the membrane comprises a rigid material.

5. A nanostructure as recited in claim 1, wherein the membrane comprises a partially rigid material.

6. A nanostructure as recited in claim 1, further comprising a first electrode adjacent to the nanopore.

7. A nanostructure as recited in claim 6, further comprising a second electrode adjacent to the nanopore.

8. A nanostructure as recited in claim 7, further comprising a voltage source in electrical connection with the first electrode and the second electrode.

9. A nanostructure as recited in claim 1, further comprising a third electrode contacting the membrane.

10. A nanostructure as recited in claim 9, further comprising a fourth electrode contacting the electrically insulating substrate.

11. A nanostructure as recited in claim 10, further comprising a voltage source in electrical connection between the third electrode and the fourth electrode.

12. A nanostructure as recited in claim 1, wherein the membrane comprises a thickness of from 1 to 1000 nanometers.

13. A nanostructure as recited in claim 1, wherein the membrane comprises a thickness of from 50 to 500 nanometers

14. A method of making a nanostructure, comprising:

a) forming an aperture through an electrically insulating substrate;

b) filling the aperture in the electrically insulating substrate with a temporary support material;

c) applying a membrane to the insulating substrate across the temporary support material;

d) removing the temporary support material to expose the membrane; and

e) forming a nanopore through the membrane to define the nanostructure.

15. A method as recited in claim 14, wherein the electrically insulating substrate comprises a material selected from the group consisting of silicon dioxide, silicon nitride and titanium.

16. A method as recited in claim 14, wherein the temporary support material is selected from the group consisting of polyimide, etchable glass, spin on glass and adhesives.

17. A method of detecting a molecule in a nanopore structure comprising a membrane, a non-conductive substrate and a set of electrodes, comprising:

(a) aligning the molecule in the nanopore structure; and

(b) detecting the molecule in the nanopore structure by applying an electrical conductance to the set of electrodes.