Ozone system for multi-chamber tools
First Claim
1. A system for controlling the flow and concentration of ozone, the system comprising:
- an ozone generator including an adjustable gas input connectable to a gas source, an adjustable power input, and a gas output connectable to a plurality of processing chambers, each of the plurality of processing chambers is set to allow a predetermined flow rate therethrough when activated;
a flow sensor used to measure a total flow rate through the plurality of processing chambers;
a first controller in communication with the flow sensor and the ozone generator, the first controller for determining an occurrence of an EVENT by comparing the total flow rate to the predetermined flow rate and for adjusting the adjustable power input of the ozone generator in accordance with data stored in a look-up table upon the occurrence of the EVENT;
a concentration sensor used to measure a concentration level of ozone in the gas output of the ozone generator; and
a second controller in communication with the concentration sensor and the ozone generator, the second controller for adjusting the adjustable power input at a given time after the occurrence of the EVENT.
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Accused Products
Abstract
An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.
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Citations
20 Claims
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1. A system for controlling the flow and concentration of ozone, the system comprising:
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an ozone generator including an adjustable gas input connectable to a gas source, an adjustable power input, and a gas output connectable to a plurality of processing chambers, each of the plurality of processing chambers is set to allow a predetermined flow rate therethrough when activated;
a flow sensor used to measure a total flow rate through the plurality of processing chambers;
a first controller in communication with the flow sensor and the ozone generator, the first controller for determining an occurrence of an EVENT by comparing the total flow rate to the predetermined flow rate and for adjusting the adjustable power input of the ozone generator in accordance with data stored in a look-up table upon the occurrence of the EVENT;
a concentration sensor used to measure a concentration level of ozone in the gas output of the ozone generator; and
a second controller in communication with the concentration sensor and the ozone generator, the second controller for adjusting the adjustable power input at a given time after the occurrence of the EVENT. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of controlling a flow of a gas comprising:
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introducing a flow of the gas to a first chamber at a concentration;
introducing the flow of the gas to a second chamber; and
using a predetermined value to adjust production of the gas such that the concentration of the gas in the first chamber remains substantially unchanged and the second chamber receives a concentration of the gas substantially the same as the concentration delivered to the first chamber after an interval of time, the interval of time being less than about 15 seconds. - View Dependent Claims (11, 12, 13, 14)
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15. A method of controlling a flow of ozone, comprising:
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introducing a flow of ozone to a first chamber at a concentration;
introducing the flow of ozone to a second chamber;
adjusting a power level delivered to an ozone generator to change a rate of production of ozone to maintain a concentration of ozone in the second chamber at a value substantially the same as the concentration of ozone in the first chamber after an interval of time;
storing in memory the power level delivered; and
using the power level as a reference during a subsequent adjustment.
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16. A method of controlling a flow of ozone in a system including a plurality of processing chambers, comprising:
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using a predictive control algorithm to control production of ozone in an ozone generator during an occurrence of an EVENT;
using a PID controller to control production of ozone in an ozone generator after the occurrence of the EVENT and to update data used in the predictive control algorithm. - View Dependent Claims (17)
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18. A system for controlling the flow and concentration of ozone produced in an ozone generator, the system comprising:
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an adjustable gas input connectable to a gas source;
an adjustable power input for regulating a concentration of ozone produced for use in a plurality of processing chambers, each of the plurality of processing chambers allowing a predetermined flow rate therethrough when activated;
a flow sensor used to measure a total flow rate through the plurality of processing chambers;
a first controller in communication with the flow sensor and the adjustable power input, the first controller determining an occurrence of an EVENT by comparing the total flow rate to the predetermined flow rate and adjusting the adjustable power input in accordance with data stored in a look-up table upon the occurrence of the EVENT;
a concentration sensor used to measure a concentration level of ozone produced; and
a second controller in communication with the concentration sensor and the adjustable power input, the second controller adjusting the adjustable power input at a given time after the occurrence of the EVENT. - View Dependent Claims (19, 20)
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Specification