Method of preparing catalyst for manufacturing carbon nanotubes
First Claim
1. A method of preparing catalyst particles for carbon nanotube manufacture, the method comprising:
- applying a catalytic metal precursor solution to a substrate, the catalytic metal precursor solution comprising a catalytic metal precursor and a solvent;
freeze-drying the catalytic metal precursor solution applied to the substrate; and
reducing the freeze-dried catalytic metal precursor to catalytic metal.
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Abstract
A novel method of forming catalyst particles, on which carbon nanotubes grow based, on a substrate with increased uniformity, and a method of synthesizing carbon nanotubes having improved uniformity are provided. A catalytic metal precursor solution is applied to a substrate. The applied catalytic metal precursor solution is freeze-dried, and then reduced to catalytic metal. The method of forming catalyst particles can minimize agglomeration and/or recrystallization of catalyst particles when forming the catalyst particles by freeze-drying the catalyst metal precursor solution. The catalyst particles formed by the method has a very uniform particle size and are very uniformly distributed on the substrate.
393 Citations
20 Claims
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1. A method of preparing catalyst particles for carbon nanotube manufacture, the method comprising:
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applying a catalytic metal precursor solution to a substrate, the catalytic metal precursor solution comprising a catalytic metal precursor and a solvent;
freeze-drying the catalytic metal precursor solution applied to the substrate; and
reducing the freeze-dried catalytic metal precursor to catalytic metal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of manufacturing carbon nanotubes, the method comprising:
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forming catalyst particles on a substrate by applying a catalytic metal precursor solution comprising a catalytic metal precursor and a solvent to the substrate, freeze-drying the catalytic metal precursor solution applied to the substrate, and reducing the freeze-dried catalytic metal precursor to a catalytic metal; and
growing carbon nanotubes on the catalyst particles by supplying a carbon source to the catalyst particles. - View Dependent Claims (11, 12, 13, 14, 15, 18)
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16. The method of 10, wherein the step of growing the carbon nanotubes comprises placing the substrate on which the catalyst particles are formed in a reaction chamber, supplying carbon precursor gas into the reaction chamber, and decomposing the carbon precursor gas in the reaction chamber to supply carbon to the catalyst particles.
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17. The method of 16, wherein the internal temperature of the reaction chamber is in the range of about 450 to 1100°
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19. A method of manufacturing carbon nanotubes, the method comprising:
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applying a catalytic metal precursor solution to the substrate, the catalytic metal precursor solution comprising a catalytic metal precursor dissolved in a solvent;
cooling the catalytic metal precursor solution applied to the substrate below the freezing point of the catalytic metal precursor solution;
evaporating the solvent in the catalytic metal precursor solution to form catalytic metal precursor particles;
converting the catalytic metal precursor particles to a catalyst particles; and
growing carbon nanotubes on the catalyst particles. - View Dependent Claims (20)
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Specification