Methods of underfilling and encapsulating semiconductor assemblies with materials having selected properties using stereolithography
First Claim
1. A method of forming a semiconductor package, comprising:
- providing a carrier substrate bearing a plurality of conductive traces;
securing at least one semiconductor die having lateral sides, a back side, and an active surface including a plurality of discrete conductive elements projecting therefrom by the plurality of discrete conductive elements to the conductive traces of the carrier substrate to form a semiconductor device assembly;
immersing the semiconductor device assembly in a first liquid photopolymerizable resin including a plurality of discrete particles dispersed therethrough; and
selectively at least partially curing portions of the first liquid photopolymerizable resin adjacent the at least one semiconductor die.
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Abstract
Methods of forming semiconductor packages include immersing a semiconductor device assembly in a liquid photopolymerizable resin including a plurality of discrete particles dispersed therethrough, and selectively at least partially curing portions of the resin adjacent at least one semiconductor die of the semiconductor device assembly. In some embodiments, the semiconductor device assembly may be immersed in a second liquid photopolymerizable resin having at least one physical property differing from the first liquid photopolymerizable resin, and the second liquid photopolymerizable resin may be selectively at least partially cured. Furthermore, the semiconductor die may have an active surface including an array of optically interactive semiconductor devices, and portions of the liquid photopolymerizable resin surrounding a periphery of the array may be selectively at least partially cured to form a substantially opaque support structure.
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Citations
25 Claims
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1. A method of forming a semiconductor package, comprising:
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providing a carrier substrate bearing a plurality of conductive traces;
securing at least one semiconductor die having lateral sides, a back side, and an active surface including a plurality of discrete conductive elements projecting therefrom by the plurality of discrete conductive elements to the conductive traces of the carrier substrate to form a semiconductor device assembly;
immersing the semiconductor device assembly in a first liquid photopolymerizable resin including a plurality of discrete particles dispersed therethrough; and
selectively at least partially curing portions of the first liquid photopolymerizable resin adjacent the at least one semiconductor die. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of forming a semiconductor package comprising:
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providing a carrier substrate having a plurality of conductive traces;
immersing the carrier substrate in a first liquid photopolymerizable resin to cover the carrier substrate with a layer thereof, the first liquid photopolymerizable resin having a first coefficient of thermal expansion in a cured state;
selectively at least partially curing the layer of the first liquid photopolymerizable resin to form a first layer exposing at least a portion of the plurality of the conductive traces through a plurality of apertures;
depositing a conductive material in the plurality of apertures;
securing at least one semiconductor die including a plurality of discrete conductive elements to the carrier substrate to form a semiconductor device assembly, the plurality of discrete conductive elements in electrical communication with the plurality of conductive traces of the carrier substrate;
immersing the semiconductor device assembly in a second liquid photopolymerizable resin, the second liquid photopolymerizable resin having a second coefficient of thermal expansion in a cured state less than the first coefficient of thermal expansion; and
selectively at least partially curing the second liquid photopolymerizable resin to form a second layer that fills at least a portion of a region between the first layer and the at least one semiconductor die and substantially seals the at least one semiconductor die. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A method of forming a semiconductor package, comprising:
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providing at least one semiconductor die having an active surface including an array of optically interactive semiconductor devices;
immersing the at least one semiconductor die in a first liquid photopolymerizable resin; and
selectively at least partially curing portions of the first liquid photopolymerizable resin surrounding a periphery of the array to form a substantially opaque support structure. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification