Angular velocity sensor
First Claim
1. An angular velocity sensor comprising:
- a first gimbal portion;
a second gimbal portion connected to the first gimbal portion by first torsion bars provided at opposing sides of the first gimbal portion;
a frame portion connected to the second gimbal portion by second torsion bars provided at the opposing sides of the second gimbal portion;
first electrostatic coupling portions provided at the opposing sides of the first gimbal portion to electrostatically couple the first gimbal portion and the second gimbal portion; and
second electrostatic coupling portions provided at the opposing sides of the second gimbal portion to electrostatically couple the second gimbal portion and the frame portion, wherein in the first gimbal portion, a maximum width of sides of a direction of the first torsion bars is greater than that of the sides where the first torsion bars are provided.
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Accused Products
Abstract
An angular velocity sensor includes a first gimbal portion, a second gimbal portion connected to the first gimbal portion by first torsion bars provided at opposing sides of the first gimbal portion, a frame portion connected to the second gimbal portion by second torsion bars provided at the opposing sides of the second gimbal portion, first electrostatic coupling portions provided at the opposing sides of the first gimbal portion to electrostatically couple the first gimbal portion and the second gimbal portion, and second electrostatic coupling portions provided at the opposing sides of the second gimbal portion to electrostatically couple the second gimbal portion and the frame portion. In the first gimbal portion, a maximum width of sides of a direction of the first torsion bars is greater than that of the sides where the first torsion bars are provided.
14 Citations
16 Claims
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1. An angular velocity sensor comprising:
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a first gimbal portion;
a second gimbal portion connected to the first gimbal portion by first torsion bars provided at opposing sides of the first gimbal portion;
a frame portion connected to the second gimbal portion by second torsion bars provided at the opposing sides of the second gimbal portion;
first electrostatic coupling portions provided at the opposing sides of the first gimbal portion to electrostatically couple the first gimbal portion and the second gimbal portion; and
second electrostatic coupling portions provided at the opposing sides of the second gimbal portion to electrostatically couple the second gimbal portion and the frame portion, wherein in the first gimbal portion, a maximum width of sides of a direction of the first torsion bars is greater than that of the sides where the first torsion bars are provided. - View Dependent Claims (3, 5, 6, 7, 8, 9, 10, 16)
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2. An angular velocity sensor comprising:
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a first gimbal portion;
a second gimbal portion connected to the first gimbal portion by first torsion bars provided at opposing sides of the first gimbal portion;
a frame portion connected to the second gimbal portion by second torsion bars provided at the opposing sides of the second gimbal portion;
a first electrostatic coupling portion provided at the opposing sides of the first gimbal portion to electrostatically couple the first gimbal portion and the second gimbal portion; and
a second electrostatic coupling portion provided at the opposing sides of the second gimbal portion to electrostatically couple the second gimbal portion and the frame portion, wherein in the second gimbal portion, a maximum width of sides of a direction of the second torsion bars is greater than that of the sides where the second torsion bars are provided. - View Dependent Claims (4, 11, 12, 13, 14, 15)
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Specification