Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor

• US 20070023140A1
• Filed: 10/03/2006
• Published: 02/01/2007
• Est. Priority Date: 10/07/2004
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Grudzien, Chris
• Granted Patent: US 7,624,643 B2
• Time in Patent Office: Days
• US Class Current: 156/311
• CPC Class Codes: G01L 9/0072 using variations in capacitance

Abstract

The present invention is directed at methods and apparatuses for facilitating the establishment of a reference pressure within a reference chamber of a pressure transducer. The transducer has a housing and a cover, the housing defining a reference chamber and an aperture. A meltable sealing material is disposed on at least one of the cover and the housing. The apparatus includes a pressure chamber that is rotatable between a first position and a second position, a pressure source that is connected to the pressure chamber, a guide that is attachable to the transducer near the aperture, and a heater for selectively heating the pressure chamber to a temperature sufficiently high to melt the sealing material. The cover is positioned in an internal space of the guide. The guide is attached to the transducer near the aperture. The transducer, cover and guide are placed in the pressure chamber, the pressure chamber is rotated to the first position and a pressure is generated in the pressure chamber via the pressure source. After a reference pressure has been established in the reference chamber, the pressure chamber is rotated to the second position. Gravity causes the cover to move within the space towards the aperture when the pressure chamber is rotated to the second position. The heater then heats the pressure chamber to melt the sealing material. Upon cooling, the sealing material forms a seal that seals the reference pressure in the reference chamber of the transducer.

Claims

1. A method for attaching a first part to a second part, the method comprising:

depositing a sealing material on at least a portion of at least one of the first part and the second part;

positioning the second part in a space defined by a guide such that gravity tends to pull the second part away from the first part;

moving the first part, the second part, and the guide so that gravity tends to pull the second part toward the first part;

melting the sealing material; and

allowing the sealing material to cool.

2. The method of claim 1, the step of moving the first part and the second part comprising rotating the first part and the second part about an axis.

3. The method of claim 1, further comprising coupling the guide to a portion of the first part.

4. The method of claim 1, further comprising:

providing a mass in the space, the first part being positioned between the mass and the second part.

5. The method of claim 4, the mass being a ball.

6. The method of claim 4, the mass comprising either Tungsten Carbide or Silicon Nitride.

7. An apparatus for use in joining a first part to a second part, a meltable joining material being disposed on at least a portion of at least one of the first part and the second part, the apparatus including:

a chamber, the chamber being moveable between a first position and a second position, the chamber being sufficiently large to house the first part and the second part;

a guide disposed within the chamber for guiding the second part, gravity tending to cause the first part and the second part to separate when the chamber is in the first position, gravity tending to cause the first part and the second part to be brought together when the chamber is in the second position; and

a heater for selectively heating the chamber to a temperature sufficiently high to melt the joining material.

8. The apparatus of claim 7, further comprising:

at least one rotation pin extending from the chamber;

a support assembly, the support assembly comprising a support bracket having at least one hole that can accommodate the at least one rotation pin of the chamber; and

the chamber being rotatable from the first position to the second position when the at least one rotation pin is engaged with the at least one hole.

9. The apparatus of claim 7, further comprising:

a pressure port defined by the chamber; and

a pressure line connected to a pressure source coupleable to the pressure port, the pressure source being capable of establishing a pressure condition in the chamber via the pressure line and the pressure port.

10. The apparatus of claim 7, further comprising:

a weight, the second part being positioned between the weight and the first part.

11. The apparatus of claim 10, the guide defining a cylindrical volume and the weight being a ball, the ball being disposed in the cylindrical volume.

12. The apparatus of claim 10, the ball comprising either Tungsten Carbide or Silicon Nitride.

13. The apparatus of claim 8, the support assembly further comprising an upper support and a lower support, a portion of the chamber resting on the lower support when the pressure housing is in the first position and a portion of the chamber resting on the upper support when the chamber is in the second position.

14. The apparatus of claim 7, the chamber further comprising a cable for rotating the chamber from the first position to the second position.

15. The apparatus of claim 7, further comprising an actuator motor and an actuator rod that can be coupled to the chamber to control the rotational position of the chamber.

16. The apparatus of claim 7, the guide having a proximal end, a distal end, and holes located between the proximal end and the distal end.