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System and method for positioning an object

  • US 20070023684A1
  • Filed: 06/23/2005
  • Published: 02/01/2007
  • Est. Priority Date: 06/23/2005
  • Status: Active Grant
First Claim
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1. A system for positioning an object, comprising:

  • a structural support member;

    a first stage including (i) at least one rotational element coupled to the structural support member and (ii) a frame coupled to the at least one rotational element operable to rotate about a first axis through use of the at least one rotational element;

    a second stage coupled to the first stage, the second stage having an object carrier adapted to move an object in a second axis; and

    a laser metrology system configured (i) to direct a laser beam in a direction substantially on and parallel to the first axis and (ii) to measure a position of the object carrier.

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