System and method for positioning an object
First Claim
1. A system for positioning an object, comprising:
- a structural support member;
a first stage including (i) at least one rotational element coupled to the structural support member and (ii) a frame coupled to the at least one rotational element operable to rotate about a first axis through use of the at least one rotational element;
a second stage coupled to the first stage, the second stage having an object carrier adapted to move an object in a second axis; and
a laser metrology system configured (i) to direct a laser beam in a direction substantially on and parallel to the first axis and (ii) to measure a position of the object carrier.
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Abstract
A motion system includes a first stage that is configured to rotate about a first axis and a second stage coupled to the first stage that includes an object carrier adapted to position an object in at least one other axis. The motion system has a novel arrangement of laser interferometer elements and axes of motion. The arrangement permits accurate and precise measurement of a position of the object carrier in up to three (or more) axes of motion even as the first stage of the motion system is tilted through relatively large angles. The novel arrangement of the axes of motion also enables very precise control of the position of the object carrier even at high tilt angles.
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Citations
25 Claims
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1. A system for positioning an object, comprising:
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a structural support member;
a first stage including (i) at least one rotational element coupled to the structural support member and (ii) a frame coupled to the at least one rotational element operable to rotate about a first axis through use of the at least one rotational element;
a second stage coupled to the first stage, the second stage having an object carrier adapted to move an object in a second axis; and
a laser metrology system configured (i) to direct a laser beam in a direction substantially on and parallel to the first axis and (ii) to measure a position of the object carrier. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of positioning an object, comprising:
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directing a laser beam in a direction substantially on and parallel to a first axis about which a first stage rotates; and
measuring, through use of the laser beam, a position of an object carrier of a second stage, coupled to the first stage, adapted to move an object in a second axis. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A system for positioning an object, comprising:
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means for directing a laser beam in a direction substantially on and parallel to a first axis about which a first stage rotates; and
means for measuring, through use of the laser beam, a position of an object carrier of a second stage, coupled to the first stage, adapted to move an object in a second axis.
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Specification