Method and apparatus of electromagnetic measurement
First Claim
1. A method of electromagnetic measurement, comprising:
- directing an electromagnetic field sensor having directivity that a received band is widened in accordance with a measurement distance toward a device under test; and
receiving an electromagnetic wave while shifting the received band in sequence to thereby measure electromagnetic interference, wherein a plurality of long and short measurement distances between the device under test and the electromagnetic field sensor are set, measurement at the long measurement distance is performed a plurality of times, and measurement at the short measurement distance is performed on a received band where electromagnetic interference is measured by the measurement at the long measurement distance.
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Accused Products
Abstract
In order to direct a probe having directivity that a received band is widened in accordance with a measurement distance, toward a DUT, shift the received band of the probe in sequence, receive electromagnetic, and measure electromagnetic interference, a plurality of long and short measurement distances between the probe and the DUT are set, and measurement at the long measurement distance and measurement at the short measurement distance are performed plural times. Herein, the measurement at the short measurement distance is performed on a received band where electromagnetic interference is measured by the measurement at the long measurement distance. Thus, measurement of electromagnetic interference can be performed with high accuracy in a short time.
47 Citations
13 Claims
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1. A method of electromagnetic measurement, comprising:
- directing an electromagnetic field sensor having directivity that a received band is widened in accordance with a measurement distance toward a device under test; and
receiving an electromagnetic wave while shifting the received band in sequence to thereby measure electromagnetic interference, whereina plurality of long and short measurement distances between the device under test and the electromagnetic field sensor are set, measurement at the long measurement distance is performed a plurality of times, and measurement at the short measurement distance is performed on a received band where electromagnetic interference is measured by the measurement at the long measurement distance. - View Dependent Claims (2, 3)
- directing an electromagnetic field sensor having directivity that a received band is widened in accordance with a measurement distance toward a device under test; and
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4. An apparatus of electromagnetic measurement, comprising:
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an electromagnetic field sensor having directivity that a received band is widened in accordance with a measurement distance, and receiving electromagnetic;
a scanning part allowing the electromagnetic field sensor and a device under test to relatively move for each received band of the electromagnetic field sensor;
a measurement distance changing part switching between a plurality of measurement distances between the electromagnetic field sensor and the device under test;
a reception processing part processing electromagnetic information transmitted from the electromagnetic field sensor; and
a controlling part performing measurement at a long measurement distance a plurality of times, and performing measurement at a short measurement distance on a received band where electromagnetic interference is measured by the measurement at the long measurement distance. - View Dependent Claims (5, 6, 7)
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8. A method of electromagnetic measurement, comprising:
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allowing an electromagnetic field sensor to move in a measurement plane spaced away from a reference plane of a device under test having an uneven surface structure to thereby measure an electromagnetic field intensity, and selecting a current estimation equation corresponding to design data indicating the surface structure of the device under test, for each coordinate point in the measurement plane; and
using the measured electromagnetic field intensity to estimate a current intensity for each coordinate point in the measurement plane based on the current estimation equation.
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9. A method of electromagnetic measurement, comprising:
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allowing an electromagnetic sensor to move in a measurement plane spaced away from a reference plane of a device under test having an uneven surface structure to thereby measure an electromagnetic field intensity, and calculating a distance between a measurement point in the device under test and the electromagnetic sensor for each coordinate point in the measurement plane from design data indicating the surface structure of the device under test; and
correcting and evaluating the measured electromagnetic field intensity based on the calculated distance.
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10. A method of electromagnetic measurement, comprising:
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allowing an electromagnetic field sensor to move in a measurement plane spaced away from a reference plane of a device under test having an uneven surface structure to thereby measure an electromagnetic field intensity, and selecting a current estimation equation corresponding to design data indicating the surface structure of the device under test, for each coordinate point in the measurement plane;
calculating a distance between the measurement point in the device under test and the electromagnetic field sensor for each coordinate point in the measurement plane from the design data; and
estimating a current intensity in the measurement plane for each coordinate point, based on the measured electromagnetic field intensity, the selected current estimation equation and the calculated distance, and evaluating the electromagnetic field intensity based on the estimated current intensity.
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11. An apparatus of electromagnetic measurement, comprising:
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an electromagnetic field sensor receiving an electromagnetic field from a device under test;
a scanning part allowing the electromagnetic field sensor to move in a measurement plane spaced away from a reference plane of the device under test;
a reception processing part performing measurement processing on the electromagnetic field intensity received by the electromagnetic field sensor moved by the scanning part; and
a calculation processing part selecting a current estimation equation corresponding to design data indicating a surface structure of the device under test, for each coordinate point in the measurement plane, and using the measured electromagnetic field intensity to thereby estimate a current intensity for each coordinate point in the measurement plane based on the current estimation equation.
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12. An apparatus of electromagnetic measurement, comprising:
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an electromagnetic field sensor receiving an electromagnetic field from a device under test;
a scanning part allowing the electromagnetic field sensor to move in a measurement plane spaced away from a reference plane of the device under test;
a reception processing part performing measurement processing on the electromagnetic field intensity received by the electromagnetic field sensor moved by the scanning part; and
a calculation processing part calculating a distance between a measurement point in the device under test and the electromagnetic field sensor, for each coordinate point in the measurement plane from design data indicating a surface structure of the device under test, and correcting the measured electromagnetic field intensity to an electromagnetic field intensity at a point spaced away from a measurement point in the device under test based on the calculated distance, for each coordinate point in the measurement plane.
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13. An apparatus of electromagnetic measurement, comprising:
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an electromagnetic field sensor receiving an electromagnetic field from a device under test;
a scanning part allowing the electromagnetic field sensor to move in a measurement plane spaced away from a reference plane of the device under test;
a reception processing part performing measurement processing on the electromagnetic field intensity received by the electromagnetic field sensor moved by the scanning part; and
a calculation processing part selecting a current estimation equation corresponding to design data indicating a surface structure of the device under test, for each coordinate point in the measurement plane, calculating a distance between a measurement point in the device under test and the electromagnetic field sensor, for each coordinate point in the measurement plane from the design data, estimating a current intensity for each coordinate point in the measurement plane based on the measured electromagnetic field intensity, the selected current estimation equation and the calculated distance, and evaluating the electromagnetic field intensity based on the estimated current intensity.
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Specification