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METHOD AND SYSTEM FOR MONITORING ENVIRONMENTAL CONDITIONS

  • US 20070024410A1
  • Filed: 05/13/2006
  • Published: 02/01/2007
  • Est. Priority Date: 05/13/2005
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical digital sensing system comprising:

  • a plurality of sensing elements on a substrate, each sensing element comprising a cantilevered bimorph beam and at least one set of open contacts configured for non-latching contact-mode operation with the bimorph beam, the bimorph beam of each sensing element being responsive to changes in an environmental condition so as to deflect toward and away from the open contacts thereof in response to the changes in the environmental condition, the bimorph beams being configured to contact and close their respective open contacts at different levels of the environmental condition, each of the sensing elements producing a digital output when the bimorph beam thereof contacts and closes the open contacts thereof; and

    an integrated circuitry interfacing with the sensing elements so that the digital outputs of the sensing elements are processed to generate a system output of the sensing system.

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