METHOD AND SYSTEM FOR MONITORING ENVIRONMENTAL CONDITIONS
First Claim
1. A micro-electro-mechanical digital sensing system comprising:
- a plurality of sensing elements on a substrate, each sensing element comprising a cantilevered bimorph beam and at least one set of open contacts configured for non-latching contact-mode operation with the bimorph beam, the bimorph beam of each sensing element being responsive to changes in an environmental condition so as to deflect toward and away from the open contacts thereof in response to the changes in the environmental condition, the bimorph beams being configured to contact and close their respective open contacts at different levels of the environmental condition, each of the sensing elements producing a digital output when the bimorph beam thereof contacts and closes the open contacts thereof; and
an integrated circuitry interfacing with the sensing elements so that the digital outputs of the sensing elements are processed to generate a system output of the sensing system.
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Abstract
A sensing system, sensing method, and method of producing a sensing system capable of providing a cumulative measurement capability, such as in the form of a RFID tag capable of measuring cumulative heat and humidity for continuous monitoring of storage and shipping conditions of various goods. The system includes integrated circuitry and a plurality of sensing elements, preferably having cantilevered bimorph beams. Each sensing element is responsive to an environmental condition so as to deflect toward and away from open contacts in response to changes in the environmental condition. Each sensing element produces a digital output when it contacts and closes its open contacts. The integrated circuitry interfaces with the sensing elements so that the digital outputs of the sensing elements are processed to generate a system output of the sensing system.
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Citations
52 Claims
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1. A micro-electro-mechanical digital sensing system comprising:
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a plurality of sensing elements on a substrate, each sensing element comprising a cantilevered bimorph beam and at least one set of open contacts configured for non-latching contact-mode operation with the bimorph beam, the bimorph beam of each sensing element being responsive to changes in an environmental condition so as to deflect toward and away from the open contacts thereof in response to the changes in the environmental condition, the bimorph beams being configured to contact and close their respective open contacts at different levels of the environmental condition, each of the sensing elements producing a digital output when the bimorph beam thereof contacts and closes the open contacts thereof; and
an integrated circuitry interfacing with the sensing elements so that the digital outputs of the sensing elements are processed to generate a system output of the sensing system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method of sensing an environmental condition, the method comprising the steps of:
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providing a sensing system comprising integrated circuitry and a plurality of contact-mode sensing elements, the sensing elements being responsive to the environmental condition and being operable to close at least one pair of open contacts at different levels of the environmental condition to individually produce digital outputs; and
interfacing the sensing elements with the integrated circuitry so that the digital outputs of the sensing elements are processed to generate a system output of the sensing system. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
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46. A method of producing a micro-electro-mechanical digital sensing system, the method comprising the steps of:
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fabricating a sensing system comprising integrated circuitry and a plurality of contact-mode sensing elements, the sensing elements being responsive to an environmental condition and operable to close at least one pair of open contacts at different levels of the environmental condition to individually produce digital outputs;
determining responses of the sensing elements to different levels of the environmental condition;
selecting a subset of the sensing elements that produce digital outputs corresponding to a predetermined range of levels of the environmental condition; and
thenconfiguring the integrated circuitry to process the digital outputs of only the subset of the sensing elements with the integrated circuitry to generate a system output of the sensing system while a remainder of the sensing elements is ignored by the integrated circuitry when generating the system output. - View Dependent Claims (47, 48, 49, 50, 51, 52)
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Specification