Method of forming a seal between a housing and a diaphragm of a capacitance sensor

• US 20070026562A1
• Filed: 10/05/2006
• Published: 02/01/2007
• Est. Priority Date: 10/07/2004
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Grudzien, Chris
• Granted Patent: US 7,316,163 B2
• Time in Patent Office: Days
• US Class Current: 438/51
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the capacitance pressure transducer. The present invention utilizes spacer elements and sealing beads to form a seal that is disposed between the housing and the diaphragm of a capacitance pressure transducer. The sealing beads have a melting temperature that is lower than the melting temperature of the spacer elements. The sealing beads are melted so that they flow around and surround the unmelted spacer elements. Upon solidifying, the sealing beads and the spacer elements thus form the seal. The thickness of the seal can be established accurately and uniformly by controlling the height of the spacer elements. By utilizing a seal that has an accurate and uniform thickness, the opposing conductors of the capacitance pressure transducer can be accurately positioned and oriented in relationship to each other during the manufacturing process.

Claims

1. A capacitance pressure transducer, comprising:

a housing;

a first conductor disposed on a face of the housing;

a diaphragm, wherein a portion of the diaphragm moves in response to a differential pressure that is acting upon the diaphragm;

a second conductor disposed on the diaphragm, the first and second conductors providing a capacitance, the capacitance being indicative of a gap that exists between a part of the diaphragm and the first conductor; and

a seal disposed between a portion of the housing and a portion of the diaphragm, the seal including a first element that at least partially surrounds a set of spacer elements, the first element and the spacer elements being comprised of a glass material, the seal having a thickness which is substantially equal to a height of the spacer elements, the first element being characterized by a first melting temperature and the spacer elements being characterized by a second melting temperature, the first melting temperature being lower than the second melting temperature.

2. The transducer of claim 1, wherein the diaphragm is comprised of a ceramic material.

3. The transducer of claim 2, wherein the ceramic material is comprised of aluminum oxide.

4. The transducer of claim 1, wherein the housing is comprised of a ceramic material.

5. The transducer of claim 1, wherein the diaphragm and the housing consist of a ceramic material comprising aluminum oxide and wherein the first element and the set of spacer elements are comprised of a glass material.

6. The transducer of claim 1, wherein the gap that exists between the part of the diaphragm and the first conductor is dependent upon the thickness of the seal.

7. The transducer of claim 6, wherein the gap is substantially equal to the seal thickness.

8. The transducer of claim 6, the first conductor having a first thickness and the second conductor having a second thickness, wherein the gap is substantially equal to the seal thickness minus the first and second thicknesses.

9. The transducer of claim 1, wherein the transducer is capable of measuring an absolute pressure.

10. The transducer of claim 1, wherein the transducer is capable of measuring a gauge pressure.

11. The transducer of claim 1, wherein the transducer is capable of measuring a differential pressure.

12. A capacitance pressure transducer assembly, comprising:

a body defining an interior cavity;

a diaphragm disposed in the body, the diaphragm dividing the interior cavity into a first chamber and a second chamber, a portion of the diaphragm moving in a first direction in response to a pressure in the first chamber being higher than a pressure in the second chamber, the portion of the diaphragm moving in a second direction opposite the first direction in response to the pressure in the second chamber being higher than the pressure in the first chamber;

a first conductor disposed on the body;

a second conductor disposed on the diaphragm, the first and second conductors providing a capacitance, the capacitance being indicative of a gap that exists between a part of the diaphragm and the first conductor; and

a seal disposed between a portion of the body and a portion of the diaphragm, the seal including a first element that at least partially surrounds a set of spacer elements, the seal having a thickness which is substantially equal to a height of the spacer elements, the first element being characterized by a first melting temperature and the spacer elements being characterized by a second melting temperature, the first melting temperature being lower than the second melting temperature.

13. An assembly according to claim 12, wherein the diaphragm is conductive and serves as the second conductor.

14. An assembly according to claim 12, the diaphragm being non-conductive, the second conductor being disposed on the diaphragm.

15. An assembly according to claim 14, wherein the diaphragm is comprised of a ceramic material.

16. An assembly according to claim 12, the body comprising an upper housing and a lower housing, the upper housing and the diaphragm defining the first chamber.

17. An assembly according to claim 16, the upper housing being comprised of a ceramic material.

18. An assembly according to claim 16, the diaphragm and the upper housing consist of a ceramic material comprising aluminum oxide and the first element and the set of spacer elements are comprised of a glass material.

19. An assembly according to claim 12, the first element and the set of spacer elements being comprised of a glass material.

20. An assembly according to claim 12, wherein the transducer assembly is capable of measuring an absolute pressure.

21. An assembly according to claim 12, wherein the transducer assembly is capable of measuring a gauge pressure.

22. An assembly according to claim 12, wherein the transducer assembly is capable of measuring a differential pressure.

23. An assembly according to claim 12, wherein the gap that exists between the part of the diaphragm and the first conductor is dependent upon the thickness of the seal.

24. An assembly according to claim 23, wherein the gap is substantially equal to the seal thickness.

25. An assembly according to claim 23, the first conductor having a first thickness and the second conductor having a second thickness, wherein the gap is substantially equal to the seal thickness minus the first and second thicknesses.