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Imaging device and its manufacturing method

  • US 20070030334A1
  • Filed: 05/26/2004
  • Published: 02/08/2007
  • Est. Priority Date: 05/30/2003
  • Status: Active Grant
First Claim
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1. An imaging apparatus, comprising:

  • a three-dimensional substrate in which a partition wall having an opening at a central portion is formed so as to cross an inner cavity;

    an optical filter that is fixed on a first flat surface of both surfaces of the partition wall so as to cover the opening;

    a semiconductor imaging device that is face-down mounted on a second flat surface of the partition wall with an imaging area facing the opening; and

    an optical system for forming images that is installed on a side of the optical filter in the inner cavity of the three-dimensional substrate, the opening of the partition wall being closed on both sides with the optical filter and the semiconductor imaging device so as to form a cavity, wherein an air passage for allowing communication between the cavity and an exterior of the three-dimensional substrate is formed on the first flat surface, and has a labyrinth structure that causes a flow rate of air passing through the air passage to vary depending on a location in the air passage.

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