Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambers
First Claim
1. A pneumatic suspension system for a load, the pneumatic suspension system comprising:
- a frame; and
a body movably disposed in the frame and spaced from a side wall of the frame by a gap to define a chamber in the frame above the body, the body being configured to be connected to the load;
wherein the frame includes an outlet to draw a gas from the chamber to lower the pressure in the chamber with respect to an ambient pressure outside the frame;
wherein an air bearing is formed in the gap between the body and the side wall of the frame to provide non-contact between the body and the frame; and
wherein the pressure in the chamber is sufficiently lower than the ambient pressure to produce a lift force to lift the body and the load connected thereto with respect to the frame.
1 Assignment
0 Petitions
Accused Products
Abstract
Embodiments of the present invention are directed to an apparatus for providing a low spring constant, pneumatic suspension using vacuum for the lens in a projection system. In one embodiment, a pneumatic suspension system for a load comprises a frame; and a body movably disposed in the frame and spaced from a side wall of the frame by a gap to define a chamber in the frame above the body, the body being configured to be connected to the load. The frame includes an outlet to draw a gas from the chamber to lower the pressure in the chamber with respect to an ambient pressure outside the frame. An air bearing is formed in the gap between the body and the side wall of the frame to provide non-contact between the body and the frame. The pressure in the chamber is sufficiently lower than the ambient pressure to produce a lift force to lift the body and the load connected thereto with respect to the frame.
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Citations
38 Claims
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1. A pneumatic suspension system for a load, the pneumatic suspension system comprising:
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a frame; and
a body movably disposed in the frame and spaced from a side wall of the frame by a gap to define a chamber in the frame above the body, the body being configured to be connected to the load;
wherein the frame includes an outlet to draw a gas from the chamber to lower the pressure in the chamber with respect to an ambient pressure outside the frame;
wherein an air bearing is formed in the gap between the body and the side wall of the frame to provide non-contact between the body and the frame; and
wherein the pressure in the chamber is sufficiently lower than the ambient pressure to produce a lift force to lift the body and the load connected thereto with respect to the frame. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A pneumatic suspension system for a load, the pneumatic suspension system comprising:
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a frame;
a body movably disposed in the frame and spaced from a side wall of the frame by a gap to define a chamber in the frame above the body, the body being configured to be connected to the load;
a seal disposed in the gap and connected between the body and the side wall of the frame; and
a force compensation motor coupled between the frame and the body;
wherein the frame includes an outlet to draw a gas from the chamber to lower the pressure in the chamber with respect to an ambient pressure outside the frame; and
wherein the pressure in the chamber is sufficiently lower than the ambient pressure to produce a lift force to lift the body and the load connected thereto with respect to the frame. - View Dependent Claims (12, 13, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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14. (canceled)
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26. A pneumatic suspension system for a load, the pneumatic suspension system comprising:
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a frame;
a body movably disposed in the frame and spaced from a side wall of the frame by a gap to define an upper chamber in the frame above the body;
an upper seal disposed in the gap and connected between the body and the side wall of the frame;
a connecting member connected to the body and configured to be connected to the load; and
a lower seal disposed below the body and connected between the connecting member and the side wall of the frame to define a lower chamber in the frame between the upper seal and the lower seal;
wherein the frame includes an upper outlet to draw a gas from the upper chamber to lower the pressure in the upper chamber with respect to an ambient pressure outside the frame;
wherein the frame includes a lower outlet to draw a gas from the lower chamber to lower the pressure in the lower chamber with respect to the ambient pressure; and
wherein the pressure in the upper chamber is sufficiently lower than the pressure in the lower chamber to produce a lift force to lift the body and the load connected thereto with respect to the frame. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification