Exposure apparatus, exposure method, and device fabricating method
First Claim
1. A lithographic apparatus comprising:
- an illumination system configured to provide a beam of radiation;
a support structure configured to hold a patterning device, the patterning device configured to impart the beam with a pattern in its cross-section;
a substrate table configured to hold a substrate;
a projection system configured to project the patterned beam onto a target portion of the substrate;
a first liquid supply system configured to at least partially fill a space between the projection system and the substrate table, with a first liquid; and
a measurement system configured to measure a location of each of a plurality of points on the substrate, the measurement system being arranged such that measurements take place through a second liquid, the second liquid not being supplied by the first liquid supply system.
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Abstract
The present invention provides an exposure apparatus that can satisfactorily perform a measurement process and can accurately perform an exposure process, even if a liquid immersion method is applied to a twin stage type exposure apparatus. An exposure apparatus (EX) comprises: two substrate stages (PST1, PST2) each capable of holding and moving a substrate (P); an exposure station (STE) that exposes, through a projection optical system (PL) and a liquid (LQ), the substrate (P) held by one substrate stage (PST1); and a measuring station (STA) that measures the substrate (P) held by the other substrate stage (PST2) or the abovementioned substrate stage (PST2); and wherein, the measurement performed at the measuring station (STA) is performed in a state wherein the liquid (LQ) is disposed on the substrate stage (PST2) or the substrate (P).
57 Citations
67 Claims
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1. A lithographic apparatus comprising:
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an illumination system configured to provide a beam of radiation;
a support structure configured to hold a patterning device, the patterning device configured to impart the beam with a pattern in its cross-section;
a substrate table configured to hold a substrate;
a projection system configured to project the patterned beam onto a target portion of the substrate;
a first liquid supply system configured to at least partially fill a space between the projection system and the substrate table, with a first liquid; and
a measurement system configured to measure a location of each of a plurality of points on the substrate, the measurement system being arranged such that measurements take place through a second liquid, the second liquid not being supplied by the first liquid supply system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 47, 48)
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14. A lithographic apparatus comprising:
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an illumination system configured to provide a beam of radiation;
a support structure configured to hold a patterning device, the patterning device configured to impart the beam with a pattern in its cross-section;
a substrate table configured to hold a substrate;
a projection system configured to project the patterned beam onto a target portion of the substrate;
a measurement system configured to measure a location of each of a plurality of points on the substrate using a measurement beam; and
a liquid supply system configured to at least partially fill a space between the projection system and the substrate table and a space between the measurement system and the substrate table with a liquid, wherein the measurement system is arranged such that the substrate table cannot simultaneously be in the path of the projection beam and the measurement beam. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 49, 50)
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25. A device manufacturing method comprising:
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measuring a location of each of a plurality of points on a substrate using a measurement beam projected from a measurement system, the measurement taking place through a liquid but not through a liquid supplied between the substrate and a projection system; and
projecting a patterned beam of radiation, through the liquid supplied between the substrate and the projection system, onto a target portion of the substrate. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 51)
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36. A device manufacturing method comprising:
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measuring a location of each of a plurality of points on a substrate using a measurement beam projected, from a measurement system, through a liquid between the measurement system and the substrate; and
projecting a patterned beam of radiation through a liquid onto a target portion of the substrate, wherein the patterned beam and measurement beam are arranged such that the substrate is not simultaneously in the path of the patterned beam and the measurement beam. - View Dependent Claims (37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 52)
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53. A lithographic apparatus, comprising:
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a substrate table configured to hold a substrate;
a projection system configured to project a patterned beam of radiation onto a target portion of the substrate;
a first liquid supply system configured to at least partially fill a space between a final element of the projection system and the substrate table, with a first liquid; and
a measurement system configured to measure a location of each of a plurality of points on the substrate, the measurement system being arranged such that measurements take place through a second liquid, the second liquid not being supplied by the first liquid supply system. - View Dependent Claims (54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65)
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66. A device manufacturing method, comprising:
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measuring, through a first liquid, a location of each of a plurality of points on a substrate, the first liquid not being supplied by a liquid supply system configured to at least partially fill a space between the substrate and a final element of the projection system with a second liquid; and
projecting a patterned beam of radiation, through the second liquid supplied between the substrate and the projection system, onto a target portion of the substrate.
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67. A lithographic apparatus, comprising:
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a substrate table configured to hold a substrate;
a projection system configured to project a patterned beam of radiation onto a target portion of the substrate, the projection system configured to project the patterned beam at an exposure station;
a measurement system configured to measure a location of each of a plurality of points on the substrate using a measurement beam, the measurement system configured to measure the location of each of the plurality of points at a measurement station displaced from the exposure station, the substrate table being movable between the exposure and measurement stations and arranged not to be simultaneously in the path of the projection beam and the measurement beam; and
a liquid supply system configured to at least partially fill a space between a final element of the projection system and the substrate table and a space between a final element of the measurement system and the substrate table with a liquid.
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Specification