Lithographic apparatus and device manufacturing method

• US 20070030470A1
• Filed: 10/12/2006
• Published: 02/08/2007
• Est. Priority Date: 12/27/2004
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Baselmans, Johannes, Tinnemans, Patricius, Jorritsma, Laurentius
• Granted Patent: US 7,239,373 B2
• Time in Patent Office: Days
• US Class Current: 355/67
• CPC Class Codes: G03F 7/70275 Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70466 Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature stitching G03F7/70475
• CPC Class Codes: G03F 7/70475 Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display
• CPC Class Codes: G03F 7/70558 Dose control, i.e. achievement of a desired dose

Abstract

A lithography apparatus including a projection system configured to project a beam of radiation onto a substrate as an array of sub-beams of radiation and an array of individually controllable elements configured to modulate the sub-beams of radiation. The apparatus also includes a data-path including at least one data manipulation device arranged to at least partly convert data defining a requested pattern to a control signal suitable for controlling the array of individually controllable elements to form substantially the requested pattern on the substrate. The data manipulation device is arranged to carry out the conversion by applying a pseudo-inverted form of a point-spread function matrix to a column vector representing the requested pattern. The point-spread function matrix includes information about the shape and relative position of the point-spread function of each spot to be exposed on the substrate by one of the sub-beams of radiation at a given time.

Claims

1. A lithography apparatus, comprising:

a patterning device configured to pattern a beam of radiation;

a projection system configured to project the patterned beam onto a target area of a substrate; and

a data manipulation device configured to convert data representing a pattern to a control signal through applying a pseudo-inverted form of a point-spread function matrix to a column vector representing the pattern, the point-spread function matrix including information about a shape and relative position of the point-spread function of spots to be exposed on the substrate by the beam of radiation, whereby the control signal is configured to be used to control the patterning device to pattern the beam.

2. The lithography apparatus of claim 1, wherein the pseudo-inverted matrix is of a type obtained by singular value decomposition of the point-spread function matrix.

3. The lithographic apparatus of claim 2, wherein singular values of the point-spread function matrix with a magnitude below a threshold value are excluded prior to an inversion.

4. The lithography apparatus of claim 3, wherein the threshold value is about 10% of the amplitude of a maximum of one of the singular values.

5. The lithography apparatus of claim 1, wherein the column vector represents the pattern as defined at a plurality of grid positions on the substrate.

6. The lithography apparatus of claim 1, wherein the beam of radiation comprises a plurality of sub-beams of radiation.

7. The lithography apparatus of claim 6, wherein the point-spread function of spots is exposed on the substrate by one of the sub-beams of radiation at a given time

8. The lithographic apparatus of claim 1, wherein the patterning device comprises an array of individually controllable elements.

9. The lithographic apparatus of claim 1, further comprising a data path that includes the data manipulation device.

10. A device manufacturing method, comprising:

converting data representing a pattern to a control signal through applying a pseudo-inverted form of a point-spread function matrix to a column vector representing the pattern, the point-spread function matrix including information about a shape and relative position of the point-spread function of spots to be exposed on a substrate by a beam of radiation;

patterning the beam of radiation based on the control signal; and

projecting the patterned beam onto a target position of the substrate.

11. The device manufacturing method of claim 10, wherein the pseudo-inverted matrix is obtained by:

decomposing the point-spread function matrix and obtaining the singular values thereof using a Singular Value Decomposition method; and

obtaining the pseudo-inverse of the point-spread function matrix based on the decomposed point-spread function matrix.

12. The device manufacturing method of claim 11, wherein singular values of the point-spread function matrix with magnitudes below a threshold value are excluded prior to an inversion.

13. The device manufacturing method of claim 12, wherein the threshold value is about 10% of an amplitude of a maximum one of the singular values.

14. The device manufacturing method of claim 10, wherein the column vector represents the pattern as defined at a plurality of grid positions on the substrate.

15. The device manufacturing method of claim 10, wherein the beam of radiation comprises a plurality of sub-beams of radiation.

16. The device manufacturing method of claim 15, wherein the point-spread function of spots is exposed on the substrate by one of the sub-beams of radiation at a given time

17. The device manufacturing method of claim 10, further comprising forming the patterned beam using a patterning device controlled by the control signal.

18. The device manufacturing method of claim 17, further comprising using an array of individually controllable elements as the patterning device.

19. The device manufacturing method of claim 10, wherein the converting step is performed using a data manipulation device in a datapath.