Broad band antireflection coating and method of making same
First Claim
1. A coated article including an anti-reflection coating supported by a substrate, the coated article comprising:
- the substrate supporting the anti-reflection coating, wherein the anti-reflection coating comprises a low index layer having a low index of refraction (n), a medium index layer having a medium index of refraction, and a high index layer having a high index of refraction;
wherein the medium index layer comprises aluminum oxynitride and is on and in direct contact with the substrate, and wherein the medium index layer comprising aluminum oxynitride has an index of refraction of from about 1.65 to 2.0;
wherein the medium index layer comprising aluminum oxynitride has an index of refraction less than that of the high index layer and greater than that of the low index layer; and
wherein the high index layer has an index of refraction of at least about 2.0, the low index layer has an index of refraction of from about 1.35 to 1.75; and
wherein the high index layer is located between and contacting the medium index layer and the low index layer.
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Accused Products
Abstract
A coated article includes a broad band antireflection (AR) coating that utilizes aluminum oxynitride (AlOxNy) in the medium index (index of refraction “n”) layer of the coating. In certain example embodiments, the coating may include the following layers from the glass substrate outwardly: aluminum oxynitride (AlOxNy) medium index layer/high index layer/low index layer. In certain example embodiments, depending on the chemical and optical properties of the low and high index layers and the substrate, x and y of the aluminum oxynitride (AlOxNy) of the medium index layer can be selected to optimize the overall performance of the broad band antireflection coating.
111 Citations
22 Claims
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1. A coated article including an anti-reflection coating supported by a substrate, the coated article comprising:
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the substrate supporting the anti-reflection coating, wherein the anti-reflection coating comprises a low index layer having a low index of refraction (n), a medium index layer having a medium index of refraction, and a high index layer having a high index of refraction;
wherein the medium index layer comprises aluminum oxynitride and is on and in direct contact with the substrate, and wherein the medium index layer comprising aluminum oxynitride has an index of refraction of from about 1.65 to 2.0;
wherein the medium index layer comprising aluminum oxynitride has an index of refraction less than that of the high index layer and greater than that of the low index layer; and
wherein the high index layer has an index of refraction of at least about 2.0, the low index layer has an index of refraction of from about 1.35 to 1.75; and
wherein the high index layer is located between and contacting the medium index layer and the low index layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A coated article including an anti-reflection coating supported by a substrate, the coated article comprising:
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the substrate supporting the anti-reflection coating, wherein the anti-reflection coating comprises a low index layer having a low index of refraction (n), a medium index layer having a medium index of refraction, and a high index layer having a high index of refraction;
wherein the medium index layer comprises aluminum oxynitride and is located below each of the high index layer and the low index layer in the coating;
wherein the medium index layer comprising aluminum oxynitride has an index of refraction less than that of the high index layer and greater than that of the low index layer. - View Dependent Claims (21, 22)
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Specification