Use of dissolved hafnium alkoxides or zirconium alkoxides as precursors for hafnium oxide and hafnium oxynitride layers or zirconium oxide and zirconium oxynitride layers

• US 20070031599A1
• Filed: 07/26/2006
• Published: 02/08/2007
• Est. Priority Date: 02/03/2004
• Status: Abandoned Application

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Knapp, Martin, Gschwandtner, Alexander
• Application Number:
  US11/493,083
• Publication Number:
  US 20070031599A1
• Time in Patent Office: Days
• US Class Current: 427/248.100
• CPC Class Codes: C23C 16/308 Oxynitrides
• CPC Class Codes: C23C 16/405 of refractory metals or yttrium
• CPC Class Codes: C23C 18/1216 Metal oxides C23C18/1212 takes precedence
• CPC Class Codes: H01L 21/02148 the material containing hafnium, e.g. HfSiOx or HfSiON
• CPC Class Codes: H01L 21/02178 the material containing aluminium, e.g. Al2O3
• CPC Class Codes: H01L 21/02181 the material containing hafnium, e.g. HfO2
• CPC Class Codes: H01L 21/02183 the material containing tantalum, e.g. Ta2O5
• CPC Class Codes: H01L 21/02186 the material containing titanium, e.g. TiO2
• CPC Class Codes: H01L 21/02189 the material containing zirconium, e.g. ZrO2
• CPC Class Codes: H01L 21/02192 the material containing at least one rare earth metal element, e.g. oxides of lanthanides, scandium or yttrium
• CPC Class Codes: H01L 21/02194 the material containing more than one metal element
• CPC Class Codes: H01L 21/02205 the layer being characterised by the precursor material for deposition
• CPC Class Codes: H01L 21/02274 in the presence of a plasma [PECVD]
• CPC Class Codes: H01L 21/0228 deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
• CPC Class Codes: H01L 21/3141 Deposition using atomic layer deposition techniques [ALD]
• CPC Class Codes: H01L 21/31645 Deposition of Hafnium oxides, e.g. HfO2
• CPC Class Codes: Y02T 50/60 Efficient propulsion technologies, e.g. for aircraft

Abstract

The present invention relates to the use of a highly concentrated solution of one or more hafnium alkoxides as precursors for hafnium oxide and hafnium oxynitride layers. The present invention relates in particular to the use of a 30 to 90% strength by weight solution of one or more hafnium alkoxides for producing hafnium oxide and hafnium oxynitride layers for CVD or ALD methods. In addition, the invention relates to a process for the production of a hafnium oxide and hafnium oxynitride layer on an article to be coated, and a hafnium alkoxide solution which contains 30 to 90% by weight of one or more hafnium alkoxides. In a further embodiment of the invention, hafnium is replaced by zirconium in said compounds.

Claims

1. The use of a solution of one or more hafnium alkoxides or zirconium alkoxides as a precursor for hafnium oxide and hafnium oxynitride layers or for zirconium oxide and zirconium oxynitride layers, a 30-90% strength by weight solution of one or more hafnium alkoxides being used as precursor for hafnium oxide and hafnium oxynitride layers or a 30-90% strength by weight solution of one or more zirconium alkoxides being used as a precursor for zirconium oxide and zirconium oxynitride layers.

2. The use as claimed in claim 1, a 50-80% strength by weight solution being used.

3. The use as claimed in one or more of the preceding claims, the hafnium oxide and hafnium oxynitride layers being produced by CVD or ALD processes.

4. The use as claimed in one or more of the preceding claims, the hafnium oxide or hafnium oxynitride layer being produced on capacitors or transistors or as an optical layer on laser mirrors.

5. The use as claimed in one or more of the preceding claims, the hafnium alkoxides used being hafnium methoxide, hafnium n-propoxide, hafnium isopropoxide and/or hafnium ethoxide.

6. The use as claimed in one or more of the preceding claims, the solution comprising 30-90% of hafnium methoxide.

7. The use as claimed in one or more of claims 1-5, the solution comprising 30-90% by weight of hafnium ethoxide.

8. The use as claimed in one or more of the preceding claims, the solution comprising, in addition to hafnium alkoxide, a solvent having a polar group.

9. The use as claimed in claim 8, the solvent being an alcoholic solvent.

10. The use as claimed in claim 9, the solvent comprising one or more straight-chain or branched C₂-C₈-alcohols.

11. The use as claimed in one or more of the preceding claims 9-10, the solvent comprising EtOH and/or the solution comprising hafnium ethoxide.

12. The use as claimed in one or more of the preceding claims, hafnium being replaced by zirconium in said compounds.

13. A process for the production of a hafnium oxide layer or zirconium oxide layer on an article to be coated, which comprises the following steps:

a) provision of a solution as defined in one or more of claims 1-12 and of an article to be coated;

b) introduction of the solution into a reactor and vaporization of the solution in the reactor, or

c) vaporization of the solution and introduction of the vapor into a reactor;

d) deposition of the vapor on the article for the formation of a hafnium oxide layer or zirconium oxide layer.

14. The process as claimed in claim 13, step c) being effected by liquid injection into the heated antechamber of the reactor, by pulsed liquid injection or aerosol vaporization.

15. The process as claimed in claim 13 or 14, the deposition process used being the MOCVD, RPE-MOCVD, ALCVD or RPE-ALCVD process.

16. The process as claimed in one or more-of claims 13-15, nitriding by means of a nitrogen-containing gas for the production of a hafnium oxynitride layer additionally being effected.

17. The process as claimed in claim 16, the gas used being N₂, NH₃, N₂O or a mixture thereof.

18. The process as claimed in one or more of the preceding claims, in which NH₃ is used as the nitrogen-containing gas or coprecursor.

19. The process as claimed in one or more of the preceding claims, hafnium being replaced by zirconium in said compounds.

20. The process as claimed in one or more of claims 14-19, the article being an MOS transistor, a capacitor or a laser mirror.

21. A hafnium alkoxide solution which contains 30-90% by weight of one or more hafnium alkoxides, the hafnium alkoxides being selected from hafnium methoxide, hafnium n-propoxide, hafnium isopropoxide and/or hafnium ethoxide, or a zirconium alkoxide solution which contains 30-90% by weight of one or more zirconium alkoxides, the zirconium alkoxides being selected from zirconium methoxide, zirconium n-propoxide, zirconium isopropoxide and/or zirconium ethoxide.

22. The hafnium alkoxide solution as claimed in claim 21, which is a 30-90% strength by weight solution of hafnium ethoxide in ethanol, or the zirconium alkoxide solution as claimed in claim 21, which is a 30-90% strength by weight solution of zirconium ethoxide.