Printable Semiconductor Structures and Related Methods of Making and Assembling
First Claim
1. A method for fabricating a printable semiconductor element, said method comprising the steps of:
- providing a silicon wafer having a (111) orientation and having an external surface;
generating a plurality of recessed features on said external surface of said silicon wafer, wherein each of said recessed features comprises a bottom surface and side surfaces of exposed silicon wafer;
masking at least a portion of said side surfaces of said recessed features; and
etching between said recessed features, wherein etching occurs along <
110>
directions of said silicon wafer, thereby fabricating said printable semiconductor element.
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Abstract
The present invention provides a high yield pathway for the fabrication, transfer and assembly of high quality printable semiconductor elements having selected physical dimensions, shapes, compositions and spatial orientations. The compositions and methods of the present invention provide high precision registered transfer and integration of arrays of microsized and/or nanosized semiconductor structures onto substrates, including large area substrates and/or flexible substrates. In addition, the present invention provides methods of making printable semiconductor elements from low cost bulk materials, such as bulk silicon wafers, and smart-materials processing strategies that enable a versatile and commercially attractive printing-based fabrication platform for making a broad range of functional semiconductor devices.
303 Citations
53 Claims
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1. A method for fabricating a printable semiconductor element, said method comprising the steps of:
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providing a silicon wafer having a (111) orientation and having an external surface;
generating a plurality of recessed features on said external surface of said silicon wafer, wherein each of said recessed features comprises a bottom surface and side surfaces of exposed silicon wafer;
masking at least a portion of said side surfaces of said recessed features; and
etching between said recessed features, wherein etching occurs along <
110>
directions of said silicon wafer, thereby fabricating said printable semiconductor element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A printable semiconductor structure comprising:
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a printable semiconductor element; and
a first bridge element connected to said printable semiconductor structure and connected to a mother wafer, wherein said printable semiconductor element and said first bridge element are at least partially undercut from said mother wafer;
wherein contacting said printable semiconductor with a transfer device is capable of fracturing said first bridge element, thereby releasing said printable semiconductor structure from said mother wafer. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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45. A method of transferring a printable semiconductor element to a transfer device, said method comprising the steps of:
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providing a printable semiconductor structure comprising a printable semiconductor element; and
at least one bridge element connected to said printable semiconductor structure and connected to a mother wafer, wherein said printable semiconductor element and said bridge element are at least partially undercut from said mother wafer;
contacting said printable semiconductor element with a transfer device having a contact surface, wherein contact between said contact surface and said printable semiconductor element binds said printable semiconductor element to said contact surface;
moving said transfer device in a manner resulting in the fracture said bridge element, thereby transferring said printable semiconductor structure from said mother wafer to said transfer device. - View Dependent Claims (46, 47, 48, 49, 50, 51)
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52. A method for assembling a printable semiconductor element on a receiving surface of a substrate, said method comprising the steps of:
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providing a printable semiconductor element; and
a first bridge element connected to said printable semiconductor structure and connected to a mother wafer, wherein said printable semiconductor element and said first bridge element are at least partially undercut from said mother wafer;
contacting said printable semiconductor element with a transfer device having a contact surface, wherein contact between said contact surface and said printable semiconductor element binds said printable semiconductor element to said contact surface;
moving said transfer device in a manner resulting in the fracture said first bridge element, thereby transferring said printable semiconductor structure from said mother wafer to said transfer device, thereby forming said contact surface having said printable semiconductor element disposed thereon;
contacting said printable semiconductor element disposed on said contact surface with said receiving surface of said substrate; and
separating said contact surface of said conformable transfer device and said printable semiconductor element, wherein said printable semiconductor element is transferred onto said receiving surface, thereby assembling said printable semiconductor element on said receiving surface of said substrate. - View Dependent Claims (53)
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Specification