System and process for providing multiple beam sequential lateral solidification

• US 20070032096A1
• Filed: 03/09/2006
• Published: 02/08/2007
• Est. Priority Date: 09/16/2003
• Status: Abandoned Application

• Current Assignee: Trustees Of Columbia University In The City Of New York (Columbia University)
• Original Assignee: Trustees Of Columbia University In The City Of New York (Columbia University)
• Inventors: Im, James
• Application Number:
  US11/372,148
• Publication Number:
  US 20070032096A1
• Time in Patent Office: Days
• US Class Current: 438/795
• CPC Class Codes: B23K 26/0604 by a combination of beams
• CPC Class Codes: B23K 26/0608 in the same heat affected zone [HAZ] B23K26/0613, B23K26/0619 take precedence
• CPC Class Codes: B23K 26/0613 having a common axis B23K26/0619 takes precedence
• CPC Class Codes: B23K 26/066 by using masks
• CPC Class Codes: B23K 26/067 Dividing the beam into multiple beams, e.g. multifocusing
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02686 Pulsed laser beam
• CPC Class Codes: H01L 21/02691 Scanning of a beam
• CPC Class Codes: H01L 27/1285 using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors

Abstract

A process and system for processing a thin film on a sample are provided. In particular, a plurality of separated beams each including beam pulses are generated. At least one first beam of the separated beams is forwarded through a mask to irradiate and heat the thin film sample prior to further irradiation. At least one second beam of the separated beams is then forwarded through a mask to further irradiate the thin film sample. Additional separated beams are sent through a mask to produce and further irradiate the thin film until the combined intensity of the beams impinging on the sample is sufficient to melt a section of the thin film throughout its entire thickness.

Claims

1. A process for producing a thin film on a sample, comprising the steps of:

(a) generating a plurality of separated beams each including beam pulses;

(b) forwarding at least a portion of at least one first beam of the separated beams to irradiate and heat at least one section of the thin film prior to further irradiation of the at least one section of the thin film;

(c) forwarding at least a portion of at least one second beam of the separated beams to further irradiate the at least one section of the thin film; and

(d) forwarding at least a portion of at least one third beam of the separated beams through a mask to further irradiate the at least one section of the thin film wherein, during the irradiation of the at least one section of the thin film at least one irradiated section of the thin film is melted throughout an entire thickness of the at least one section of the thin film.

2. The process according to claim 1, further comprising forwarding at least a portion of at least a multiplicity of separated beams to further irradiate the at least one section of the thin film wherein, during the irradiation of the at least one section of the thin film by the multiplicity of beams the at least one irradiated section of the thin film is melted throughout an entire thickness of the at least one section of the thin film.

3. The process according to claim 1, wherein the separated beams are forwarded to impinge and irradiate the at least one section of the thin film at different times, wherein the effective pulse duration of the at least a portion of at least one second beam and the at least a portion of at least one third beam that impinge and irradiate the at least one section of the thin film is increased.

4. The process according to claim 1, wherein the beams are forwarded through different optical paths to impinge and irradiate the at least one section of the thin film at different times.

5. The process according to claim 1, wherein the plurality of separated beams are generated by separate beam generating sources.

6. The process according to claim 1, wherein at least the at least one third beam of the separated beams have a corresponding intensity which is lower than an intensity required to damage or degrade the mask.

7. The process according to claim 1, wherein the separated beams have a corresponding intensity which is lower than an intensity required to melt the at least one section of the silicon thin film throughout the entire thickness thereof.

8. The process according to claim 1, wherein, after step (d), the at least one irradiated and melted section of the thin film is allowed to re-solidify and crystallize.

12. The process according to claim 1, wherein the at least one first beam of the separated beams is passed through a mask to further irradiate the at least one section of the thin film.

13. The process according to claim 1, wherein the at least one second beam of the separated beams is passed through a mask to further irradiate the at least one section of the thin film.

14. The process according to claim 1, wherein the mask has a dot-like pattern such that dot portions of the pattern are opaque regions of the mask which prevent certain portions of the separated beams to irradiate there through.

15. The process according to claim 1, wherein the mask has a line pattern such that line portions of the pattern are opaque regions of the mask which prevent certain portions of the separated beams to irradiate there through.

16. The process according to claim 1, wherein the mask has a transparent pattern such that transparent portions of the pattern do not include opaque regions therein, the opaque regions capable of preventing certain portions of the separated beams to irradiate there through.

9. The process according to claim 9, further comprising microtranslating the sample so that the separated beams impinge at least one previously irradiated, fully melted, re-solidified and crystallized portion of the section of the thin film.

10. The process according to claim 10, further comprising translating the thin film sample so that the separated beams impinge a further section of the thin film, wherein the further section of the thin film at least partially overlaps the irradiated and melted section that was allowed to re-solidify and crystallize.

11. The process according to claim 10, wherein the separated beams pulses irradiate the at least one previously irradiated section of the thin film and fully melt the section of the thin film.

17. A system for processing a thin film on a sample, comprising:

a memory storing a computer program; and

a processing arrangement executing the computer program to perform the following steps;

(a) controlling an irradiation beam generator to generate a plurality of separated beams;

(b) forwarding at least a portion of at least one first beam of the separated beams to irradiate and heat at least one section of the thin film prior to further irradiation of the at least one section of the thin film;

(c) forwarding at least a portion of at least one second beam of the separated beams to further irradiate the at least one section of the thin film; and

(d) forwarding at least a portion of at least one third beam of the separated beams through a mask to further irradiate the at least one section of the thin film

wherein, during the irradiation of the at least one section of the thin the at least one irradiated section of the thin film is melted throughout an entire thickness of the at least one section of the thin film.

18. The system according to claim 17, further comprising a beam splitter arranged in a vicinity of the processing arrangement, wherein the processing arrangement causes the irradiation beam to be forwarded to the beam splitter which separates the irradiation beam into a plurality of separated beams.

19. The system according to claim 18, wherein the beam splitter is located upstream in a path of the irradiation beams from the mask.

20. The system according to claim 17, wherein at least the at least one third beam of the separated beams has a corresponding intensity which is lower than an intensity required to damage or degrade the mask.

21. The system according to claim 17, wherein the processing arrangement executes the computer program to forward the at least one first beam of the separated beam pulses through a mask.

22. The system according to claim 17, wherein the processing arrangement executes the computer program to forward the at least one second beam of the separated beam pulses through a mask.

23. The system according to claim 17, wherein the third set of separated beams has a corresponding intensity which is lower than an intensity required to melt the at least one section of the silicon thin film throughout the entire thickness thereof.

24. The system according to claim 17, wherein, when at least one section of the silicon thin film is irradiated, the at least one irradiated and melted section of the silicon thin film is allowed to re-solidify and crystallize.

25. The system according to claim 17, wherein, during step (d), the at least one irradiated and melted section of the thin film is allowed to re-solidify and crystallize.

26. The system according to claim 25, further comprising microtranslating the sample so that the separated beams impinge at least one previously irradiated, fully melted, re-solidified and crystallized portion of the section of the thin film.

27. The system according to claim 26, further comprising translating the thin film sample so that the separated beams impinge a further section of the thin film, wherein the further section of the thin film at least partially overlaps the irradiated and melted section that was allowed to re-solidify and crystallize.

28. The system according to claim 26, wherein the separated beams pulses and irradiate the at least one previously irradiated section of the thin film and fully melt the section of the thin film.

29. The system according to claim 17, wherein the mask has a dot-like pattern such that dot portions of the pattern are opaque regions of the mask which prevent certain portions of the separated beams to irradiate there through.

30. The system according to claim 17, wherein the mask has a line pattern such that line portions of the pattern are opaque regions of the mask which prevent certain portions of the separated beams to irradiate there through.

31. The system according to claim 17, wherein the mask has a transparent pattern such that transparent portions of the pattern do not include opaque regions therein, the opaque regions capable of preventing certain portions of the separated beams to irradiate there through.