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Method and apparatus for processing semiconductor work pieces

  • US 20070032097A1
  • Filed: 05/24/2006
  • Published: 02/08/2007
  • Est. Priority Date: 08/05/2005
  • Status: Abandoned Application
First Claim
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1. A processing apparatus for semiconductor work pieces, comprising:

  • a processing chamber having an internal cavity and which has a plurality of rotatable processing stations within the internal cavity, and which are each operable to process a semiconductor work piece.

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