Ultrasonic flow sensor

• US 20070034016A1
• Filed: 08/10/2006
• Published: 02/15/2007
• Est. Priority Date: 08/12/2005
• Status: Active Grant

• Current Assignee: Brooks Instrument LLC (Illinois Tool Works Inc.)
• Original Assignee: Celerity Incorporated (ICHOR Holdings, Ltd.)
• Inventors: Vu, Kim, Maginnis, Thomas
• Granted Patent: US 7,360,448 B2
• Time in Patent Office: Days
• US Class Current: 73/861.280
• CPC Class Codes: G01F 1/662 Constructional details

Abstract

An ultrasonic flow sensor that includes a conduit having a length, a first ultrasonic transducer disposed at a first position along the length of the conduit, a second ultrasonic transducer disposed at a second position along the length of the conduit, the second position being spaced apart from the first position, a first reflecting interface and a second reflecting interface. The first reflecting interface is in registration with the first ultrasonic transducer to receive first acoustic energy from the first ultrasonic transducer and to reflect the first acoustic energy in a direction generally along a length of the conduit and into a fluid within the conduit. The second reflecting interface is in registration with the second ultrasonic transducer to receive second acoustic energy from the second ultrasonic transducer and to reflect the second acoustic energy in a direction generally along the length of the conduit and into the fluid within the conduit.

Claims

1. A flow sensor comprising:

a conduit having a length and a longitudinal axis that extends parallel to the length;

a first ultrasonic transducer disposed at a first position along the length of the conduit, the first ultrasonic transducer having a transducer face configured to receive and transmit acoustic energy along a first path segment;

a second ultrasonic transducer disposed at a second position along the length of the conduit, the second ultrasonic transducer having a transducer face configured to receive and transmit acoustic energy along a second path segment;

a first reflecting interface having a first reflecting surface positioned to reflect acoustic energy from a direction along one of the first path segment and a third path segment to a direction along the other of the first path segment and the third path segment, the third path segment extending from the first reflecting surface to the longitudinal axis; and

a second reflecting interface having a second reflecting surface positioned to reflect acoustic energy from a direction along one of the second path segment and a fourth path segment to a direction along the other of the second path segment and the fourth path segment, the fourth path segment extending from the second reflecting surface to the longitudinal axis.

2. The flow sensor of claim 1, wherein each of the first path segment and the second path segment is substantially parallel to the longitudinal axis.

3. The flow sensor of claim 2, wherein the third path segment intersects the longitudinal axis at a first acute angle, and the fourth path segment intersects the longitudinal axis at a second acute angle with the first acute angle being substantially equal to the second acute angle.

4. The flow sensor of claim 3, wherein the first ultrasonic transducer is configured to transmit acoustic energy as a longitudinal acoustic wave toward the first reflecting surface and the second ultrasonic transducer is configured to transmit acoustic energy as a longitudinal acoustic wave toward the second reflecting surface.

5. The flow sensor of claim 4, wherein the first reflecting interface and the second reflecting interface are integrally formed with the conduit and from a same material as the conduit.

6. The flow sensor of claim 5, wherein the first reflecting interface and the second reflecting interface are symmetric about the longitudinal axis.

7. The flow sensor of claim 6, wherein each of the first reflecting surface and the second reflecting surface is formed at an acute angle with respect to the longitudinal axis of the conduit.

8. The flow sensor of claim 7, wherein the first reflecting interface has a flat face in registration with the transducer face of the first ultrasonic transducer, and wherein the transducer face of the first reflecting interface is perpendicular to the longitudinal axis of the conduit.

9. The flow sensor of claim 8, wherein the second reflecting interface has a flat face in registration with the transducer face of the second ultrasonic transducer, and wherein the flat face of the second reflecting interface is perpendicular to the longitudinal axis of the conduit.

10. The flow sensor of claim 1, wherein a ratio of an outer diameter of the conduit relative to an inner diameter of the conduit is approximately 2.

11. The flow sensor of claim 1, wherein the conduit is constructed and arranged to reflect acoustic energy received from the first reflecting surface towards the second reflecting surface along a direction that is approximately perpendicular to the transducer face of the second ultrasonic transducer.

12. The flow sensor of claim 11, wherein the conduit is constructed and arranged to reflect acoustic energy received from the second reflecting surface towards the first reflecting surface along a direction that is approximately perpendicular to the transducer face of the first ultrasonic transducer.

13. The flow sensor of claim 1, wherein the first and second ultrasonic transducers are ring shaped ultrasonic transducers.

14. The flow sensor of claim 13, wherein each of the first and second ultrasonic transducers has an inner diameter that is greater than an outer diameter of the conduit.

15. The flow sensor of claim 14, wherein the inner diameter of each of the first and second ultrasonic transducers is spaced apart from the outer diameter of the conduit to provide an air gap there between.

16. The flow sensor of claim 15, wherein the first and second reflecting interfaces and the conduit are formed from PFA.

17. The flow sensor of claim 1, wherein the first reflecting interface and the second reflecting interface are integrally formed with the conduit and from a same material as the conduit.

18. The flow sensor of claim 1, wherein the first reflecting interface and the second reflecting interface are symmetric about the longitudinal axis of the conduit.

19. The flow sensor of claim 1, wherein each of the first reflecting surface and the second reflecting surface is formed at an acute angle with respect to the longitudinal axis of the conduit.

20. The flow sensor of claim 19, wherein the reflecting surface of each of the first reflecting interface and the second reflecting interface is formed at an acute angle that is between approximately 18 and 27 degrees with respect to the longitudinal axis of the conduit.

21. The flow sensor of claim 1, wherein the first reflecting interface has a flat face in registration with the transducer face of the first ultrasonic transducer, and wherein the transducer face of the first reflecting interface is perpendicular to the longitudinal axis of the conduit.

22. The flow sensor of claim 21, wherein the second reflecting interface has a flat face in registration with the transducer face of the second ultrasonic transducer, and wherein the flat face of the second reflecting interface is perpendicular to the longitudinal axis of the conduit.

23. The flow sensor of claim 22, wherein a ratio of an outer cross-sectional dimension of the conduit relative to an inner cross-sectional dimension of the conduit is approximately 2.

24. The flow sensor of claim 1, further comprising a third ultrasonic transducer disposed at a third position along the length of the conduit, the third position being spaced between the first and second positions.

25. The flow sensor of claim 1, wherein the first reflecting interface and the second reflecting interface have a conical shape.

26. The flow sensor of claim 25, wherein the conical shape of the first reflecting interface and the second reflecting interface extends about the conduit 360 degrees.

27. The flow sensor of claim 1, wherein the first reflecting interface, the second reflecting interface, and the conduit are axially symmetric.

28. The flow sensor of claim 1, wherein the first reflecting surface and the second reflecting surface have a conical shape.

29. A method of measuring flow rate of a fluid in a conduit, comprising acts of:

generating first acoustic waves that propagate along a first path segment;

reflecting the first acoustic waves into the conduit and the fluid within the conduit at a first position spaced along a length of the conduit;

receiving the first acoustic waves reflected into the conduit and the fluid within the conduit at a second position that is spaced apart from the first position along the length of the conduit; and

reflecting the received waves toward an acoustic receiver along a second path segment.

30. The method of claim 29, wherein the act of generating first acoustic waves includes generating longitudinal acoustic waves.

31. The method of claim 30, wherein the act of reflecting includes reflecting the first acoustic waves toward the conduit such that the first acoustic waves are incident on an 10 outer surface of the conduit at a predetermined angle relative to a longitudinal axis of the conduit.

32. The method of claim 31, wherein the act of reflecting includes reflecting the first acoustic waves such that the first acoustic waves pass into an interior portion of the conduit and periodically reflect off a surface of the conduit and intersect the longitudinal axis of the conduit more than once prior to reception of the first acoustic waves.

33. The method of claim 32, wherein the first path segment is substantially parallel to the second path segment.

34. The method of claim 33, wherein the act of reflecting the waves into the conduit includes positioning a first reflecting surface at a first reflection angle relative to the first path segment, and wherein the act of reflecting the received waves includes positioning a second reflecting surface at a second reflection angle relative to the first path segment with the first reflection angle being substantially equal to the second reflection angle.

35. The method of claim 34, wherein each of the first reflecting surface and the second reflecting surface has a conical shape and is integrally formed with the conduit and made from a same material as the conduit.

36. The method of claim 35, wherein the fluid is a semiconductor polishing slurry, and wherein the method further includes determining a flow rate of the fluid in the conduit.

37. The method of claim 29, wherein a ratio of an acoustic impedance of the conduit relative to an acoustic impedance of the fluid is between approximately 0.17 to 5.8.

38. The method of claim 29, wherein a ratio of an acoustic impedance of the conduit relative an acoustic impedance of the fluid is between approximately 0.3 to 3.

39. The method of claim 29, wherein a ratio of a longitudinal velocity of the acoustic waves in the conduit relative to a longitudinal velocity of the acoustic waves in the fluid is approximately 0.5 to 2.

40. The method of claim 29, wherein the act of generating first acoustic waves includes generating shear acoustic waves.

41. The method of claim 29, wherein the act of generating first acoustic waves includes generating radially polarized shear waves.

42. The method of claim 35, further comprising:

generating second acoustic waves that propagate along the second path segment;

reflecting the second acoustic waves into the conduit and the fluid within the conduit at the second position;

receiving the second acoustic waves reflected into the conduit and the fluid within the conduit at the first position; and

reflecting the second received waves toward an acoustic receiver along the first path segment.

43. The method of claim 29, wherein the act of reflecting the first acoustic waves includes reflecting the first acoustic waves such that the first acoustic waves pass into an interior portion of the conduit and periodically reflect off a surface of the conduit and intersect the longitudinal axis of the conduit more than once prior to reception of the first acoustic waves.

44. The method of claim 29, wherein the first path segment is substantially parallel to the second path segment.

45. The method of claim 29, wherein the act of reflecting the waves into the conduit includes positioning a first reflecting surface at a first reflection angle relative to the first path segment, and wherein the act of reflecting the received waves includes positioning a second reflecting surface at a second reflection angle relative to the first path segment with the first reflection angle being substantially equal to the second reflection angle.

46. The method of claim 45, wherein each of the first reflecting surface and the second reflecting surface has a conical shape and is integrally formed with the conduit and made from a same material as the conduit.

47. The method of claim 29, wherein the fluid is a semiconductor polishing slurry, and wherein the method further includes determining a flow rate of the fluid in the conduit.

48. The method of claim 29, further comprising:

generating second acoustic waves that propagate along the second path segment;

reflecting the second acoustic waves into the conduit and the fluid within the conduit at the second position;

receiving the second acoustic waves reflected into the conduit and the fluid within the conduit at the first position; and

reflecting the second received waves toward an acoustic receiver along the first path segment.

49. The method of claim 48, wherein the act of reflecting the first acoustic waves includes reflecting the first acoustic waves such that the first acoustic waves pass into an interior portion of the conduit and periodically reflect off a surface of the conduit and intersect the longitudinal axis of the conduit more than once prior to reception of the first acoustic waves.

50. The method of claim 49, wherein the act of reflecting the second acoustic waves includes reflecting the second acoustic waves such that the second acoustic waves pass into an interior portion of the conduit and periodically reflect off a surface of the conduit and intersect the longitudinal axis of the conduit more than once prior to reception of the second acoustic waves.

51. The method of claim 50, wherein the fluid is a semiconductor polishing slurry, and wherein the method further includes determining a flow rate of the fluid in the conduit.

52. A flow sensor for determining flow rate of a fluid, the flow sensor comprising:

a conduit having a length and a longitudinal axis that extends parallel to the length;

a first ultrasonic transducer disposed at a first position along the length of the conduit;

a second ultrasonic transducer disposed at a second position along the length of the conduit; and

means for directing first acoustic energy from the first transducer to the second transducer such that the first acoustic energy impinges on an inner surface of the conduit at a first predetermined angle and such that the first acoustic energy passes into an interior portion of the conduit and periodically reflects off a surface of the conduit and intersects the longitudinal axis of the conduit more than once prior to reception of the first acoustic energy at the second ultrasonic transducer.

53. The flow sensor of claim 52, wherein the means for directing first acoustic energy includes means for directing second acoustic energy from the second transducer to the first transducer such that the second acoustic energy impinges on an inner surface of the conduit at a second predetermined angle and such that the second acoustic energy passes into an interior portion of the conduit and periodically reflects off a surface of the conduit and intersects the longitudinal axis of the conduit more than once prior to reception of the second acoustic energy at the first ultrasonic transducer.

54. The flow sensor of claim 53, wherein the first predetermined angle is substantially equal to the second predetermined angle.

55. The flow sensor of claim 54, wherein the fluid is a semiconductor polishing slurry, and wherein the flow sensor further includes means for determining a flow rate of the fluid in the conduit.

56. The flow sensor of claim 55, wherein the first transducer is configured to generate longitudinal acoustic waves along a first axis, and the second transducer is configured to generate longitudinal acoustic waves along a second path segment with the first path segment being substantially parallel to the second path segment.

57. The flow sensor of claim 58, wherein each of the first path segment and the second path segment is substantially parallel to the longitudinal axis of the conduit.