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EXPOSURE MASK

  • US 20070037069A1
  • Filed: 08/07/2006
  • Published: 02/15/2007
  • Est. Priority Date: 08/12/2005
  • Status: Active Grant
First Claim
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1. An exposure mask wherein a phase difference Δ

  • θ

    of i-line (365 nm) which transmits through a transparent region and a semi-transparent region and a transmittance n of the semi-transparent region with respect to the exposure light satisfy Formula 1.
    Δ

    θ



    arccos (−



    n/2) 



    [Formula 1]

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