Method of Forming Three-Dimensional Features on Light Emitting Diodes for Improved Light Extraction
First Claim
1. A method of obtaining a lenticular pattern on the surface of a light emitting diode, the method comprising imprinting a pattern into a layer of etchable material that is positioned on a semiconductor surface that is in turn adjacent a light emitting active region.
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Accused Products
Abstract
A method is disclosed for obtaining a high-resolution lenticular pattern on the surface of a light emitting diode. The method comprises imprinting a patterned sacrificial layer of etchable material that is positioned on a semiconductor surface that is in turn adjacent a light emitting active region, and thereafter etching the imprinted sacrificial layer and the underlying semiconductor to transfer an imprinted pattern into the semiconductor layer adjacent the light emitting active region.
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Citations
62 Claims
- 1. A method of obtaining a lenticular pattern on the surface of a light emitting diode, the method comprising imprinting a pattern into a layer of etchable material that is positioned on a semiconductor surface that is in turn adjacent a light emitting active region.
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29. An LED precursor structure comprising:
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at least one Group III nitride active layer;
a photoresist layer on said Group III nitride-layer; and
an embossing stamp pressed into said photoresist layer. - View Dependent Claims (30, 31, 32)
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33. A method of obtaining a high resolution lenticular pattern on a wide bandgap light emitting diode;
- the method comprising;
adding a photoresist layer to the surface of a semiconductor layer which in turn is on at least one Group III nitride active layer which in turn is on a submounting structure;
heating the photoresist layer to a temperature sufficient to internally soften the photoresist but less than the temperature at which the photoresist would lose its self resolution structure;
imprinting the heated photoresist layer with an embossing stamp that carries the negative image of the pattern desired for the photoresist;
removing the stamp from the photoresist to leave behind an embossed patterned photoresist;
curing the patterned photoresist; and
removing the entire patterned photoresist layer in a plasma etch along with corresponding portions of the underlying semiconductor layer to produce a lenticular pattern in the semiconductor layer corresponding to the embossing stamp, the embossed photoresist, and the etching ratio between the photoresist and the semiconductor in the plasma etch. - View Dependent Claims (34, 35, 36, 37, 38)
- the method comprising;
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39. A method of obtaining a lenticular surface on a light emitting diode precursor, the method comprising:
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adding a planarizing material to a plurality of silicon carbide mesas and adjacent trenches on a common Group III nitride layer which in turn is on a submounting structure;
removing the planarizing material from the surface of the silicon carbide mesas while permitting the material to remain in the trenches between adjacent silicon carbide mesas and to thereby present a common planar surface of silicon carbide and planarizing material;
adding a photoresist layer to the common planar surface;
imprinting the photoresist with an embossing stamp;
removing the embossing stamp from the imprinted photoresist; and
etching the photoresist to completely remove the photoresist, the planarizing material and portions of the underlying silicon carbide to produce a lenticular pattern in the silicon carbide defined by the embossed photoresist and the etch ratio between the photoresist and the silicon carbide in the etching material. - View Dependent Claims (40, 41, 42)
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43. An LED comprising:
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a conductive substrate;
at least one light-emitting active layer on said substrate; and
a patterned semiconductor lenticular surface on said active layer opposite said substrate with no more than 25 microns of non-lenticular material between said patterned lenticular surface and said active layer. - View Dependent Claims (44, 45, 46, 47, 48)
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49. A method of obtaining a lenticular pattern on the surface of a light emitting diode, the method comprising:
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imprinting a patterned sacrificial layer of etchable material that is positioned on the surface of a semiconductor structure that includes a light emitting active region; and
thereafter etching the imprinted sacrificial layer and the underlying semiconductor to transfer the imprinted pattern. - View Dependent Claims (50, 51, 52, 53)
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54. A method of obtaining a lenticular pattern on the surface of a light emitting diode, the method comprising:
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imprinting a pattern into a layer of photoresist that is positioned on a semiconductor surface that is in turn adjacent a light emitting active region;
masking the photoresist with a complementary pattern;
exposing and developing the photoresist; and
thereafter etching the imprinted developed photoresist and the underlying semiconductor to transfer the imprinted and complementary patterns into the semiconductor layer adjacent the light emitting active region. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61, 62)
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Specification